A selective CH4 sensor using semiconducting Ga2O3 thin films based on temperature switching of multigas reactions

Maximilian Fleischer, Hans Meixner

Research output: Contribution to journalArticle

48 Citations (Scopus)

Abstract

Ga2O3 thin films have been developed as advantageous base materials for sensors to detect reducing gases. Due to the large operating temperature range of the sensors, a temperature-programmed setting of the gas sensitivity is possible. CH4 detection at 420 °C demonstrates the known problems with metal-oxide gas detectors. At an operating temperature above 700 °C, the sensitivity towards other reducing gases and water diminishes, whereas there is a very strong CH4 effect of about two orders of magnitude in conductance change. At a correct operating temperature, there is no significant effect resulting from the coadsorption of other reducing gases on the CH4 sensor characteristics. Resistance values at this temperature have proven to be stable over several hundreds of hours, even in the case of continuous exposure to CH4.

Original languageEnglish
Pages (from-to)544-547
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume25
Issue number1-3
DOIs
Publication statusPublished - 1995

Fingerprint

Semiconducting films
operating temperature
Thin films
Gases
sensors
Sensors
thin films
gases
gas detectors
Temperature
temperature
Gas detectors
metal oxides
Oxides
Metals
sensitivity
Water
water

Keywords

  • Gallium oxide
  • Methane sensors
  • Temperature switching

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Instrumentation
  • Analytical Chemistry
  • Electrochemistry

Cite this

A selective CH4 sensor using semiconducting Ga2O3 thin films based on temperature switching of multigas reactions. / Fleischer, Maximilian; Meixner, Hans.

In: Sensors and Actuators, B: Chemical, Vol. 25, No. 1-3, 1995, p. 544-547.

Research output: Contribution to journalArticle

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