A polymer-based spiky microelectrode array for electrocorticography

Gergely Márton, Marcell Kiss, Gábor Orbán, Anita Pongrácz, I. Ulbert

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The advanced technology of microelectromechanical systems (MEMS) makes possible precise and reproducible construction of various microelectrode arrays (MEAs) with patterns of high spatial density. Polymer-based MEMS devices are gaining increasing attention in the field of electrophysiology, since they can be used to form flexible, yet reliable electrical interfaces with the central and the peripheral nervous system. In this paper we present a novel MEA, designed for obtaining neural signals, with a polyimide (PI)—platinum (Pt)—SU-8 layer structure. Electrodes with special, arrow-like shapes were formed in a single row, enabling slight penetration into the tissue. The applied process flow allowed reproducible batch fabrication of the devices with high yield. In vitro characterization of the electrode arrays was performed with electrochemical impedance spectroscopy in lactated Ringer’s solution. Functional tests were carried out by performing acute recordings on rat neocortex. The devices have proven to be convenient tools for acute in vivo electrocorticography.

Original languageEnglish
Pages (from-to)619-624
Number of pages6
JournalMicrosystem Technologies
Volume21
Issue number3
DOIs
Publication statusPublished - 2014

Fingerprint

Microelectrodes
MEMS
Polymers
Electrophysiology
Electrodes
microelectromechanical systems
polymers
Neurology
peripheral nervous system
Platinum
Electrochemical impedance spectroscopy
electrophysiology
Polyimides
Rats
electrodes
Tissue
polyimides
Fabrication
rats
platinum

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

A polymer-based spiky microelectrode array for electrocorticography. / Márton, Gergely; Kiss, Marcell; Orbán, Gábor; Pongrácz, Anita; Ulbert, I.

In: Microsystem Technologies, Vol. 21, No. 3, 2014, p. 619-624.

Research output: Contribution to journalArticle

Márton, Gergely ; Kiss, Marcell ; Orbán, Gábor ; Pongrácz, Anita ; Ulbert, I. / A polymer-based spiky microelectrode array for electrocorticography. In: Microsystem Technologies. 2014 ; Vol. 21, No. 3. pp. 619-624.
@article{c342907d70104ccca388cfc568b60e27,
title = "A polymer-based spiky microelectrode array for electrocorticography",
abstract = "The advanced technology of microelectromechanical systems (MEMS) makes possible precise and reproducible construction of various microelectrode arrays (MEAs) with patterns of high spatial density. Polymer-based MEMS devices are gaining increasing attention in the field of electrophysiology, since they can be used to form flexible, yet reliable electrical interfaces with the central and the peripheral nervous system. In this paper we present a novel MEA, designed for obtaining neural signals, with a polyimide (PI)—platinum (Pt)—SU-8 layer structure. Electrodes with special, arrow-like shapes were formed in a single row, enabling slight penetration into the tissue. The applied process flow allowed reproducible batch fabrication of the devices with high yield. In vitro characterization of the electrode arrays was performed with electrochemical impedance spectroscopy in lactated Ringer’s solution. Functional tests were carried out by performing acute recordings on rat neocortex. The devices have proven to be convenient tools for acute in vivo electrocorticography.",
author = "Gergely M{\'a}rton and Marcell Kiss and G{\'a}bor Orb{\'a}n and Anita Pongr{\'a}cz and I. Ulbert",
year = "2014",
doi = "10.1007/s00542-014-2203-y",
language = "English",
volume = "21",
pages = "619--624",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",
number = "3",

}

TY - JOUR

T1 - A polymer-based spiky microelectrode array for electrocorticography

AU - Márton, Gergely

AU - Kiss, Marcell

AU - Orbán, Gábor

AU - Pongrácz, Anita

AU - Ulbert, I.

PY - 2014

Y1 - 2014

N2 - The advanced technology of microelectromechanical systems (MEMS) makes possible precise and reproducible construction of various microelectrode arrays (MEAs) with patterns of high spatial density. Polymer-based MEMS devices are gaining increasing attention in the field of electrophysiology, since they can be used to form flexible, yet reliable electrical interfaces with the central and the peripheral nervous system. In this paper we present a novel MEA, designed for obtaining neural signals, with a polyimide (PI)—platinum (Pt)—SU-8 layer structure. Electrodes with special, arrow-like shapes were formed in a single row, enabling slight penetration into the tissue. The applied process flow allowed reproducible batch fabrication of the devices with high yield. In vitro characterization of the electrode arrays was performed with electrochemical impedance spectroscopy in lactated Ringer’s solution. Functional tests were carried out by performing acute recordings on rat neocortex. The devices have proven to be convenient tools for acute in vivo electrocorticography.

AB - The advanced technology of microelectromechanical systems (MEMS) makes possible precise and reproducible construction of various microelectrode arrays (MEAs) with patterns of high spatial density. Polymer-based MEMS devices are gaining increasing attention in the field of electrophysiology, since they can be used to form flexible, yet reliable electrical interfaces with the central and the peripheral nervous system. In this paper we present a novel MEA, designed for obtaining neural signals, with a polyimide (PI)—platinum (Pt)—SU-8 layer structure. Electrodes with special, arrow-like shapes were formed in a single row, enabling slight penetration into the tissue. The applied process flow allowed reproducible batch fabrication of the devices with high yield. In vitro characterization of the electrode arrays was performed with electrochemical impedance spectroscopy in lactated Ringer’s solution. Functional tests were carried out by performing acute recordings on rat neocortex. The devices have proven to be convenient tools for acute in vivo electrocorticography.

UR - http://www.scopus.com/inward/record.url?scp=84922577610&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84922577610&partnerID=8YFLogxK

U2 - 10.1007/s00542-014-2203-y

DO - 10.1007/s00542-014-2203-y

M3 - Article

VL - 21

SP - 619

EP - 624

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 3

ER -