A point source analytical model of inverse pulsed laser deposition

A. A. Morozov, Z. Geretovszky, L. Égerházi, T. Szörényi

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Abstract

A simple analytical model for inverse pulsed laser deposition is proposed. In the model the motion of the evaporated material is assumed to emerge as from a point source located above the surface of evaporation at some distance. The obtained thickness profiles of inverse deposited films agree well with those calculated by the test particle Monte Carlo method. The proposed approach has been applied for analysis of experimental data on inverse pulsed laser deposition of graphite in nitrogen atmosphere with nanosecond pulses of laser fluences between 1 and 7 J/cm2. The model describes well the thickness profiles and pressure dependence of film growth rate for inverse deposition.

Original languageEnglish
Pages (from-to)691-696
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Volume93
Issue number3
DOIs
Publication statusPublished - Nov 1 2008

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ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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