A novel PLD configuration for deposition of films of improved quality

A case study of carbon nitride

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Pairs of carbon nitride films have simultaneously been deposited by ArF excimer laser ablation of a graphite target in the 2-50 Pa nitrogen pressure window, with one substrate parallel and 48-mm apart from the target in the traditional on-axis geometry, and the other placed in the target plane. The pressure dependence of the apparent growth rate, defined as the measured thickness per number of pulses, is significantly different for the two geometries. In the traditional geometry the growth rate is almost constant at around 0.0035 and 0.023 nm/pulse for 1 and 5 J cm-2, respectively, while in the target plane it increases proportionally to the logarithm of the nitrogen pressure for both fluences. Complementary surface characterisation by atomic force microscopy reveals that the films grown in the novel geometry, referred to as inverse pulsed laser deposition, are made up of smaller grains and appear to be more compact.

Original languageEnglish
Pages (from-to)1207-1209
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Volume79
Issue number4-6
Publication statusPublished - Sep 2004

Fingerprint

carbon nitrides
Carbon nitride
Pulsed laser deposition
Geometry
geometry
configurations
Nitrogen
nitrogen
Graphite
Excimer lasers
Laser ablation
pulses
logarithms
excimer lasers
pressure dependence
laser ablation
pulsed laser deposition
Atomic force microscopy
fluence
graphite

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

@article{322e1698d5fd4ccb98de492a1fe534c5,
title = "A novel PLD configuration for deposition of films of improved quality: A case study of carbon nitride",
abstract = "Pairs of carbon nitride films have simultaneously been deposited by ArF excimer laser ablation of a graphite target in the 2-50 Pa nitrogen pressure window, with one substrate parallel and 48-mm apart from the target in the traditional on-axis geometry, and the other placed in the target plane. The pressure dependence of the apparent growth rate, defined as the measured thickness per number of pulses, is significantly different for the two geometries. In the traditional geometry the growth rate is almost constant at around 0.0035 and 0.023 nm/pulse for 1 and 5 J cm-2, respectively, while in the target plane it increases proportionally to the logarithm of the nitrogen pressure for both fluences. Complementary surface characterisation by atomic force microscopy reveals that the films grown in the novel geometry, referred to as inverse pulsed laser deposition, are made up of smaller grains and appear to be more compact.",
author = "T. Sz{\"o}r{\'e}nyi and B. Hopp and Z. Geretovszky",
year = "2004",
month = "9",
language = "English",
volume = "79",
pages = "1207--1209",
journal = "Applied Physics A: Materials Science and Processing",
issn = "0947-8396",
publisher = "Springer Verlag",
number = "4-6",

}

TY - JOUR

T1 - A novel PLD configuration for deposition of films of improved quality

T2 - A case study of carbon nitride

AU - Szörényi, T.

AU - Hopp, B.

AU - Geretovszky, Z.

PY - 2004/9

Y1 - 2004/9

N2 - Pairs of carbon nitride films have simultaneously been deposited by ArF excimer laser ablation of a graphite target in the 2-50 Pa nitrogen pressure window, with one substrate parallel and 48-mm apart from the target in the traditional on-axis geometry, and the other placed in the target plane. The pressure dependence of the apparent growth rate, defined as the measured thickness per number of pulses, is significantly different for the two geometries. In the traditional geometry the growth rate is almost constant at around 0.0035 and 0.023 nm/pulse for 1 and 5 J cm-2, respectively, while in the target plane it increases proportionally to the logarithm of the nitrogen pressure for both fluences. Complementary surface characterisation by atomic force microscopy reveals that the films grown in the novel geometry, referred to as inverse pulsed laser deposition, are made up of smaller grains and appear to be more compact.

AB - Pairs of carbon nitride films have simultaneously been deposited by ArF excimer laser ablation of a graphite target in the 2-50 Pa nitrogen pressure window, with one substrate parallel and 48-mm apart from the target in the traditional on-axis geometry, and the other placed in the target plane. The pressure dependence of the apparent growth rate, defined as the measured thickness per number of pulses, is significantly different for the two geometries. In the traditional geometry the growth rate is almost constant at around 0.0035 and 0.023 nm/pulse for 1 and 5 J cm-2, respectively, while in the target plane it increases proportionally to the logarithm of the nitrogen pressure for both fluences. Complementary surface characterisation by atomic force microscopy reveals that the films grown in the novel geometry, referred to as inverse pulsed laser deposition, are made up of smaller grains and appear to be more compact.

UR - http://www.scopus.com/inward/record.url?scp=4344563263&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4344563263&partnerID=8YFLogxK

M3 - Article

VL - 79

SP - 1207

EP - 1209

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

SN - 0947-8396

IS - 4-6

ER -