A novel micro-structured reference material for microbeam analysis

Uwe Wätjen, Csaba Dücsö, Antonella Tajani, Frans Munnik, Frank Lechtenberg

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

In order to determine the beam spot size and the linear or raster scanning properties of microprobe analytical systems, a novel certified reference material (CRM) has been developed by IRMM, consisting of permalloy (81% Ni, 19% Fe) strip patterns of different widths on a silicon substrate. The general layout of this micro-structured reference material with pattern sizes ranging from 2 to 100 μm, fabricated with production schemes of microelectronics circuitry on silicon wafers, is discussed. The large size range of the individual pattern structures makes the material equally applicable to very fine and less focused microbeams. Several long distances between characteristic patterns as well as broad line widths of selected structures are certified for each individual chip. First chips of this material were investigated with high-energy ion microprobes as well as with X-ray microprobes with capillary optics. Due to the very good definition of the metal lines and their edge profiles, line scan results of XRF, PIXE or RBS can be directly converted to spot size and microbeam profile. A special set of micro-structures on the CRM chips allows to obtain quantitative information about the "skirt" of microbeams.

Original languageEnglish
Pages (from-to)359-365
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume161-163
DOIs
Publication statusPublished - Jan 1 2000
EventThe 14th International Conference on Ion Beam Analysis - 6th European Conference on Accelerators in Applied Research and Technology - Dresden, Germany
Duration: Jul 26 1999Jul 30 1999

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Keywords

  • Beam spot size
  • Certified distances
  • Certified reference material
  • Micro-lithography
  • Microbeam profile
  • Permalloy
  • Scanning system parameters

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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