A novel method for the cross‐sectional TEM preparation of thin films deposited onto water‐soluble substrates

György Sáfrán, Pierre Panine

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A preparational method was developed solving the problem of cross‐sectional TEM preparation of thin films and layer systems deposited onto water‐soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross‐sectional TEM micrographs of Ag and Ag/Ag2Se layers are shown presenting the efficiency of this novel technique. © 1993 Wiley‐Liss, Inc.

Original languageEnglish
Pages (from-to)346-349
Number of pages4
JournalMicroscopy Research and Technique
Volume25
Issue number4
DOIs
Publication statusPublished - Jul 1 1993

Keywords

  • Ion beam thinning
  • Replacement of film
  • Water‐soluble substrate

ASJC Scopus subject areas

  • Anatomy
  • Histology
  • Instrumentation
  • Medical Laboratory Technology

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