A preparational method was developed solving the problem of cross‐sectional TEM preparation of thin films and layer systems deposited onto water‐soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross‐sectional TEM micrographs of Ag and Ag/Ag2Se layers are shown presenting the efficiency of this novel technique. © 1993 Wiley‐Liss, Inc.
- Ion beam thinning
- Replacement of film
- Water‐soluble substrate
ASJC Scopus subject areas
- Medical Laboratory Technology