A novel evaluation method to determine the fractal dimension of SEM images

A study of Au/Pd/GaAs contacts during heat treatment

M. Schuszter, Z. Bodnár, L. Dobos, I. Mojzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Heat treatment is an essential technological step for making ohmic contacts to compound semiconductors. During the heat treatment a remarkable volatile component (arsenic) loss takes place due to the thermal decomposition of GaAs and the interactions between Ga and the contact metals. Using a scanning electron microscope combined with a mass spectrometer it was possible to examine the changes of the surface pattern and to measure the As evaporation. We introduced a new method (soft segmentation) to determine the fractal dimension of multi-cluster images.

Original languageEnglish
Title of host publicationPhysica Status Solidi C: Conferences
Pages1051-1054
Number of pages4
Edition3
DOIs
Publication statusPublished - 2003
Event6th International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, EXMATEC 2002 - Budapest, Hungary
Duration: May 26 2002May 29 2002

Other

Other6th International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, EXMATEC 2002
CountryHungary
CityBudapest
Period5/26/025/29/02

Fingerprint

Fractal dimension
fractals
heat treatment
Heat treatment
Scanning electron microscopy
scanning electron microscopy
Ohmic contacts
evaluation
Arsenic
Mass spectrometers
arsenic
mass spectrometers
thermal decomposition
electric contacts
Evaporation
Pyrolysis
Electron microscopes
electron microscopes
Metals
evaporation

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

Cite this

A novel evaluation method to determine the fractal dimension of SEM images : A study of Au/Pd/GaAs contacts during heat treatment. / Schuszter, M.; Bodnár, Z.; Dobos, L.; Mojzes, I.

Physica Status Solidi C: Conferences. 3. ed. 2003. p. 1051-1054.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Schuszter, M, Bodnár, Z, Dobos, L & Mojzes, I 2003, A novel evaluation method to determine the fractal dimension of SEM images: A study of Au/Pd/GaAs contacts during heat treatment. in Physica Status Solidi C: Conferences. 3 edn, pp. 1051-1054, 6th International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, EXMATEC 2002, Budapest, Hungary, 5/26/02. https://doi.org/10.1002/pssc.200306326
Schuszter, M. ; Bodnár, Z. ; Dobos, L. ; Mojzes, I. / A novel evaluation method to determine the fractal dimension of SEM images : A study of Au/Pd/GaAs contacts during heat treatment. Physica Status Solidi C: Conferences. 3. ed. 2003. pp. 1051-1054
@inproceedings{d46e73d4955540a9bef3fa0c42fe487c,
title = "A novel evaluation method to determine the fractal dimension of SEM images: A study of Au/Pd/GaAs contacts during heat treatment",
abstract = "Heat treatment is an essential technological step for making ohmic contacts to compound semiconductors. During the heat treatment a remarkable volatile component (arsenic) loss takes place due to the thermal decomposition of GaAs and the interactions between Ga and the contact metals. Using a scanning electron microscope combined with a mass spectrometer it was possible to examine the changes of the surface pattern and to measure the As evaporation. We introduced a new method (soft segmentation) to determine the fractal dimension of multi-cluster images.",
author = "M. Schuszter and Z. Bodn{\'a}r and L. Dobos and I. Mojzes",
year = "2003",
doi = "10.1002/pssc.200306326",
language = "English",
pages = "1051--1054",
booktitle = "Physica Status Solidi C: Conferences",
edition = "3",

}

TY - GEN

T1 - A novel evaluation method to determine the fractal dimension of SEM images

T2 - A study of Au/Pd/GaAs contacts during heat treatment

AU - Schuszter, M.

AU - Bodnár, Z.

AU - Dobos, L.

AU - Mojzes, I.

PY - 2003

Y1 - 2003

N2 - Heat treatment is an essential technological step for making ohmic contacts to compound semiconductors. During the heat treatment a remarkable volatile component (arsenic) loss takes place due to the thermal decomposition of GaAs and the interactions between Ga and the contact metals. Using a scanning electron microscope combined with a mass spectrometer it was possible to examine the changes of the surface pattern and to measure the As evaporation. We introduced a new method (soft segmentation) to determine the fractal dimension of multi-cluster images.

AB - Heat treatment is an essential technological step for making ohmic contacts to compound semiconductors. During the heat treatment a remarkable volatile component (arsenic) loss takes place due to the thermal decomposition of GaAs and the interactions between Ga and the contact metals. Using a scanning electron microscope combined with a mass spectrometer it was possible to examine the changes of the surface pattern and to measure the As evaporation. We introduced a new method (soft segmentation) to determine the fractal dimension of multi-cluster images.

UR - http://www.scopus.com/inward/record.url?scp=69249228637&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=69249228637&partnerID=8YFLogxK

U2 - 10.1002/pssc.200306326

DO - 10.1002/pssc.200306326

M3 - Conference contribution

SP - 1051

EP - 1054

BT - Physica Status Solidi C: Conferences

ER -