A new method for the measurement of thickness in single crystals

János L. Lábár, Jerzy Morgiel

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A new method for thickness determination of single-crystal thin samples at exact zone axis orientation, based on pattern recognition in convergent beam electron diffraction (CBED), is presented. The method is especially well suited to materials with a large unit cell in zone axis directions where the reciprocal lattice is uniformly dense with diffraction points. The new method is based on comparison of a measured CBED zone axis pattern with a set of calculated ones. Its accuracy was estimated to be around 10% in the 5-100 nm thickness range as checked for garnets at the [111] zone orientation.

Original languageEnglish
Pages (from-to)425-430
Number of pages6
JournalMicron
Volume29
Issue number6
DOIs
Publication statusPublished - Dec 1 1998

Keywords

  • ALCHEMI
  • Convergent beam electron diffraction (CBED)
  • Pattern recognition
  • Single crystal
  • Thickness measurement

ASJC Scopus subject areas

  • Structural Biology
  • Materials Science(all)
  • Physics and Astronomy(all)
  • Cell Biology

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