The structure of evaporated amorphous silicon and amorphous silicon prepared by glow discharge technique is investigated using phase contrast electron microscopy and electron diffraction. While evaporated Si shows a supernetwork of density fluctuations commonly observed in evaporated amorphous tetrahedrally bonded semiconductors, glow discharge Si shows no such quasiperiodic heterogeneous density fluctuation. Electron diffraction patterns are obtained using a translation detector, which directly measures the electron intensity in the image plane of the electron microscope. From the resulting RDF it is concluded, that there is a higher degree of local order in glow discharge Si.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics