355 nm nanosecond pulsed Nd:YAG laser profile measurement, metal thin film ablation and thermal simulation

István Bozsóki, Bálint Balogh, Péter Gordon

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Laser ablation of nickel, gold and copper thin film on glass substrates has been investigated using a nanosecond pulsed Nd:YAG laser operating at 355 nm in air with a Gaussian intensity profile. The exact beam profile was measured through mechanical scanning with a photodiode. A small beam defect was observed, which can affect the machining performance at higher pulse energies. The ablation thresholds of the films were calculated from the crater diameter values. The effect of the pulse repetition rate and the film thickness was also studied. At high pulse repetition rates heat accumulation was observed and the ablation threshold decreased with the film thickness. Both cases resulted in higher diameters.

Original languageEnglish
Pages (from-to)1212-1218
Number of pages7
JournalOptics and Laser Technology
Volume43
Issue number7
DOIs
Publication statusPublished - Oct 1 2011

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Keywords

  • Nanosecond pulsed laser ablation
  • Nd:YAG
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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