248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy

Z. Czigány, M. Adamik, Norbert Kaiser

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages187-193
Number of pages7
Volume2966
DOIs
Publication statusPublished - 1997
EventLaser-Induced Damage in Optical Materials: 1996 - Boulder, CO, United States
Duration: Oct 7 1996Oct 7 1996

Other

OtherLaser-Induced Damage in Optical Materials: 1996
CountryUnited States
CityBoulder, CO
Period10/7/9610/7/96

Fingerprint

Optical Coatings
Optical coatings
optical coatings
Transmission Electron Microscopy
Laser beam effects
Irradiation
Multilayer
Optical multilayers
Laser
Transmission electron microscopy
Recrystallization
transmission electron microscopy
irradiation
Lasers
concentrating
Electron Beam
Scatter
Evaporation
Reflectance
Interaction

Keywords

  • Conditioning
  • Damage threshold
  • LaF/MgF quarter-wave multilayer
  • Laser interaction
  • Recrystallization
  • Roughness
  • Texture
  • Transmission electronmicroscopy
  • UV irradiation
  • Waviness

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Czigány, Z., Adamik, M., & Kaiser, N. (1997). 248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2966, pp. 187-193) https://doi.org/10.1117/12.274288

248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy. / Czigány, Z.; Adamik, M.; Kaiser, Norbert.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2966 1997. p. 187-193.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Czigány, Z, Adamik, M & Kaiser, N 1997, 248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2966, pp. 187-193, Laser-Induced Damage in Optical Materials: 1996, Boulder, CO, United States, 10/7/96. https://doi.org/10.1117/12.274288
Czigány Z, Adamik M, Kaiser N. 248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2966. 1997. p. 187-193 https://doi.org/10.1117/12.274288
Czigány, Z. ; Adamik, M. ; Kaiser, Norbert. / 248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2966 1997. pp. 187-193
@inproceedings{938ff5f04a6c4dba8b0aa39feab1abdf,
title = "248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy",
abstract = "LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.",
keywords = "Conditioning, Damage threshold, LaF/MgF quarter-wave multilayer, Laser interaction, Recrystallization, Roughness, Texture, Transmission electronmicroscopy, UV irradiation, Waviness",
author = "Z. Czig{\'a}ny and M. Adamik and Norbert Kaiser",
year = "1997",
doi = "10.1117/12.274288",
language = "English",
volume = "2966",
pages = "187--193",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - 248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy

AU - Czigány, Z.

AU - Adamik, M.

AU - Kaiser, Norbert

PY - 1997

Y1 - 1997

N2 - LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

AB - LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

KW - Conditioning

KW - Damage threshold

KW - LaF/MgF quarter-wave multilayer

KW - Laser interaction

KW - Recrystallization

KW - Roughness

KW - Texture

KW - Transmission electronmicroscopy

KW - UV irradiation

KW - Waviness

UR - http://www.scopus.com/inward/record.url?scp=58149296312&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=58149296312&partnerID=8YFLogxK

U2 - 10.1117/12.274288

DO - 10.1117/12.274288

M3 - Conference contribution

AN - SCOPUS:58149296312

VL - 2966

SP - 187

EP - 193

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -