248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

Original languageEnglish
Pages (from-to)176-181
Number of pages6
JournalThin Solid Films
Volume312
Issue number1-2
Publication statusPublished - Jan 14 1998

Fingerprint

Optical coatings
optical coatings
Laser beam effects
Optical multilayers
Transmission electron microscopy
transmission electron microscopy
irradiation
Lasers
concentrating
Grain growth
lasers
Multilayers
textures
Textures
interactions
reflectance
coatings
Coatings
Substrates
lanthanum trifluoride

Keywords

  • Laser irradiation
  • Multilayers
  • Optical coatings
  • Structural properties

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy. / Czigány, Zs; Adamik, M.; Kaiser, N.

In: Thin Solid Films, Vol. 312, No. 1-2, 14.01.1998, p. 176-181.

Research output: Contribution to journalArticle

@article{42bea077f96b45e7bdee167ac3a02c8c,
title = "248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy",
abstract = "LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.",
keywords = "Laser irradiation, Multilayers, Optical coatings, Structural properties",
author = "Zs Czig{\'a}ny and M. Adamik and N. Kaiser",
year = "1998",
month = "1",
day = "14",
language = "English",
volume = "312",
pages = "176--181",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1-2",

}

TY - JOUR

T1 - 248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy

AU - Czigány, Zs

AU - Adamik, M.

AU - Kaiser, N.

PY - 1998/1/14

Y1 - 1998/1/14

N2 - LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

AB - LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

KW - Laser irradiation

KW - Multilayers

KW - Optical coatings

KW - Structural properties

UR - http://www.scopus.com/inward/record.url?scp=0031675054&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031675054&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031675054

VL - 312

SP - 176

EP - 181

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-2

ER -