• 1916 Citations
  • 22 h-Index
1982 …2020

Research output per year

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Research Output

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Conference article

Complex dielectric function of ion implantation amorphized SiC determined by spectroscopic ellipsometry

Lohner, T., Zolnai, Z., Petrik, P., Battistig, G., Garcia López, J., Morilla, Y., Koós, A., Osváth, Z. & Fried, M., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1374-1377 4 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)

Defect profiling by ellipsometry using ion implantation through wedge masks

Fried, M., Khanh, N. Q. & Petrik, P., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1227-1230 4 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)

Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry

Petrik, P., Cayrel, F., Fried, M., Polgár, O., Lohner, T., Vincent, L., Alquier, D. & Gyulai, J., May 1 2004, In : Thin Solid Films. 455-456, p. 344-348 5 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)
4 Citations (Scopus)

Dose-dependence of ion implantation-caused damage in silicon measured by ellipsometry and backscattering spectrometry

Fried, M., Petrik, P., Lohner, T., Khánh, N. Q., Polgár, O. & Gyulai, J., May 1 2004, In : Thin Solid Films. 455-456, p. 404-409 6 p.

Research output: Contribution to journalConference article

13 Citations (Scopus)

Ellipsometric characterization of flagellin films for biosensor applications

Kozma, P., Nagy, N., Kurunczi, S., Petrik, P., Hámori, A., Muskotál, A., Vonderviszt, F., Fried, M. & Bársony, I., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1427-1430 4 p.

Research output: Contribution to journalConference article

12 Citations (Scopus)

Ellipsometric characterization of oxidized porous silicon layer structures

Lohner, T., Fried, M., Petrik, P., Polgár, O., Gyulai, J. & Lehnert, W., Jan 14 2000, In : Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 69, p. 182-187 6 p.

Research output: Contribution to journalConference article

23 Citations (Scopus)

Ellipsometric study of ion-implantation damage in single-crystal silicon - An advanced optical model

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N. Q. & Gyulai, J., Jan 1 2002, In : Solid State Phenomena. 82-84, p. 765-770 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Evaluation of ellipsometric measurements using complex strategies

Polgár, O., Fried, M., Lohner, T. & Bársony, I., May 1 2004, In : Thin Solid Films. 455-456, p. 95-100 6 p.

Research output: Contribution to journalConference article

9 Citations (Scopus)

Fabrication of phase gratings in glass by ion implantation

Bányász, I., Fried, M., Dücso, C., Vértesy, Z. & Hajdú, C., Dec 1 1998, In : Proceedings of SPIE - The International Society for Optical Engineering. 3291, p. 120-131 12 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)

In situ spectroscopic ellipsometry for the characterization of polysilicon formation inside a vertical furnace

Petrik, P., Lehnert, W., Schneider, C., Fried, M., Lohner, T., Gyulai, J. & Ryssel, H., Mar 27 2000, In : Thin Solid Films. 364, 1, p. 150-155 6 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)

Ion implantation-caused damage in SiC measured by spectroscopic ellipsometry

Petrik, P., Shaaban, E. R., Lohner, T., Battistig, G., Fried, M., Lopez, J. G., Morilla, Y., Polgár, O. & Gyulai, J., May 1 2004, In : Thin Solid Films. 455-456, p. 239-243 5 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)

Ion implantation induced disorder in single-crystal and sputter-deposited polycrystalline CdTe characterized by ellipsometry and backscattering spectrometry

Petrik, P., Khánh, N. Q., Li, J., Chen, J., Collins, R. W., Fried, M., Radnóczi, G. Z., Lohner, T. & Gyulai, J., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1358-1361 4 p.

Research output: Contribution to journalConference article

8 Citations (Scopus)

Light emission versus excitation from porous structures in ion-implanted silicon

Vazsonyi, E., Barsony, I., Lohner, T., Fried, M., Erostyak, J., Racz, M. & Paszti, F., Jan 1 1995, In : Materials Research Society Symposium - Proceedings. 358, p. 653-658 6 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)

Modular, PC controlled photometric ellipsometer with variable angle of incidence and spectral options

Mosoni, T., Petrik, P., Fried, M. & Bársony, I., Aug 19 1998, In : Proceedings of SPIE - The International Society for Optical Engineering. 3573, p. 355-358 4 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Nanophotonics of biomaterials and inorganic nanostructures

Petrik, P., Agocs, E., Kalas, B., Fodor, B., Lohner, T., Nador, J., Saftics, A., Kurunczi, S., Novotny, T., Perez-Feró, E., Nagy, R., Hamori, A., Horvath, R., Hózer, Z. & Fried, M., Feb 22 2017, In : Journal of Physics: Conference Series. 794, 1, 012004.

Research output: Contribution to journalConference article

Non-collimated beam ellipsometry

Juhász, G., Horváth, Z., Major, C., Petrik, P., Polgár, O. & Fried, M., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1081-1084 4 p.

Research output: Contribution to journalConference article

24 Citations (Scopus)

Non-destructive optical depth profiling and real-time evaluation of spectroscopic data

Fried, M. & Rédei, L., Mar 27 2000, In : Thin Solid Films. 364, 1, p. 64-74 11 p.

Research output: Contribution to journalConference article

8 Citations (Scopus)

Optical characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

Schmidt, C., Petrik, P., Schneider, C., Fried, M., Lohner, T., Bársony, I., Gyulai, J. & Ryssel, H., May 1 2004, In : Thin Solid Films. 455-456, p. 495-499 5 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)

Optical characterization of macro-, micro- and nanostructures using polarized light

Petrik, P., Kumar, N., Juhasz, G., Major, C., Fodor, B., Agocs, E., Lohner, T., Pereira, S. F., Urbach, H. P. & Fried, M., 2014, In : Journal of Physics: Conference Series. 558, 1, 012008.

Research output: Contribution to journalConference article

6 Citations (Scopus)

Optimisation of porous silicon based passive optical elements by means of spectroscopic ellipsometry

Volk, J., Fried, M., Polgár, O. & Bársony, I., May 1 2003, In : Physica Status Solidi (A) Applied Research. 197, 1, p. 208-211 4 p.

Research output: Contribution to journalConference article

13 Citations (Scopus)

Phase grating fabrication in glass via ion implantation

Bányász, I., Fried, M., Dücso, C. & Vértesy, Z., Dec 1 2002, In : Proceedings of SPIE - The International Society for Optical Engineering. 4944, p. 171-182 12 p.

Research output: Contribution to journalConference article

Pore propagation directions in P+ porous silicon

Vázsonyi, É., Battistig, G., Horváth, Z. E., Fried, M., Kádár, G., Pászti, F., Cantin, J. L., Vanhaeren, D., Stalmans, L. & Poortmans, J., Jan 1 2000, In : Journal of Porous Materials. 7, 1, p. 57-61 5 p.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Rapid thermal oxidation for passivation of porous silicon

Barsony, I., Klappe, J. G. E., Vazsonyi, E., Lohner, T. & Fried, M., 1994, In : Materials Research Society Symposium - Proceedings. 342, p. 91-96 6 p.

Research output: Contribution to journalConference article

9 Citations (Scopus)

Spectroscopic ellipsometric study of Ge nanocrystals embedded in SiO 2 using parametric models

Basa, P., Petrik, P., Fried, M., Dâna, A., Aydinli, A., Foss, S. & Finstad, T. G., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1332-1336 5 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)

The ideal vehicle for optical model development: Porous silicon multilayers

Volk, J., Fried, M., Tóth, A. L. & Bársony, I., May 1 2004, In : Thin Solid Films. 455-456, p. 535-539 5 p.

Research output: Contribution to journalConference article

7 Citations (Scopus)

Thin Solid Films: Preface

Fried, M., Hingeri, K. & Humlíček, J., May 1 2004, In : Thin Solid Films. 455-456, p. 1-2 2 p.

Research output: Contribution to journalConference article

Wide angle beam ellipsometry for extremely large samples

Major, C., Juhász, G., Horváth, Z., Polgar, O. & Fried, M., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1077-1080 4 p.

Research output: Contribution to journalConference article

17 Citations (Scopus)