• 1896 Citations
  • 21 h-Index
1982 …2020

Research output per year

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Article
2020

Determination of the complex dielectric function of ion-implanted amorphous germanium by spectroscopic ellipsometry

Lohner, T., Szilágyi, E., Zolnai, Z., Németh, A., Fogarassy, Z., Illés, L., Kótai, E., Petrik, P. & Fried, M., May 1 2020, In : Coatings. 10, 5, 480.

Research output: Contribution to journalArticle

Open Access
2018

Gold Nanorod Plasmon Resonance Damping Effects on a Nanopatterned Substrate

Zolnai, Z., Zámbó, D., Osváth, Z., Nagy, N., Fried, M., Németh, A., Pothorszky, S., Szekrényes, D. P. & Deák, A., Nov 1 2018, In : Journal of Physical Chemistry C. 122, 43, p. 24941-24948 8 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
2017

Ellipsometric and X-Ray Spectrometric Investigation of Fibrinogen Protein Layers

Kalas, B., Pollakowski, B., Nutsch, A., Streeck, C., Nador, J., Fried, M., Beckhoff, B. & Petrik, P., Dec 1 2017, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 14, 12, 1700210.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide

Lohner, T., Serényi, M., Szilágyi, E., Zolnai, Z., Czigány, Z., Khánh, N. Q., Petrik, P. & Fried, M., Nov 1 2017, In : Applied Surface Science. 421, p. 636-642 7 p.

Research output: Contribution to journalArticle

Spectroscopic ellipsometry of columnar porous Si thin films and Si nanowires

Fodor, B., Defforge, T., Agócs, E., Fried, M., Gautier, G. & Petrik, P., Nov 1 2017, In : Applied Surface Science. 421, p. 397-404 8 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)
2016

Effective medium approximation of ellipsometric response from random surface roughness simulated by finite-element method

Fodor, B., Kozma, P., Burger, S., Fried, M. & Petrik, P., Oct 30 2016, In : Thin Solid Films. 617, p. 20-24 5 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Grating coupled optical waveguide interferometry combined with in situ spectroscopic ellipsometry to monitor surface processes in aqueous solutions

Agocs, E., Kozma, P., Nador, J., Hamori, A., Janosov, M., Kalas, B., Kurunczi, S., Fodor, B., Ehrentreich-Förster, E., Fried, M., Horváth, R. & Petrik, P., Jun 15 2016, (Accepted/In press) In : Applied Surface Science.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Plasmon-enhanced two-channel in situ Kretschmann ellipsometry of protein adsorption, cellular adhesion, and polyelectrolyte deposition on titania nanostructures

Nador, J., Kalas, B., Saftics, A., Agocs, E., Kozma, P., Kõrösi, L., Szekacs, I., Fried, M., Horváth, R. & Petrik, P., Mar 7 2016, In : Optics Express. 24, 5, p. 4812-4823 12 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Porosity and thickness characterization of porous Si and oxidized porous Si layers - An ultraviolet-visible-mid infrared ellipsometry study

Fodor, B., Agocs, E., Bardet, B., Defforge, T., Cayrel, F., Alquier, D., Fried, M., Gautier, G. & Petrik, P., Jun 2016, In : Microporous and Mesoporous Materials. 227, p. 112-120 9 p.

Research output: Contribution to journalArticle

13 Citations (Scopus)
2015

Determination of migration of ion-implanted Ar and Zn in silica by backscattering spectrometry

Szilágyi, E., Bányász, I., Kótai, E., Németh, A., Major, C., Fried, M. & Battistig, G., Mar 4 2015, In : Radiation Effects and Defects in Solids. 170, 3, p. 229-237 9 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Fourier ellipsometry - An ellipsometric approach to Fourier scatterometry

Petrik, P., Kumar, N., Fried, M., Fodor, B., Juhasz, G., Pereira, S. F., Burger, S. & Urbach, H. P., Jan 29 2015, In : Journal of the European Optical Society. 10, 15002.

Research output: Contribution to journalArticle

6 Citations (Scopus)
2014

Characterization of in-depth cavity distribution after thermal annealing of helium-implanted silicon and gallium nitride

Fodor, B., Cayrel, F., Agocs, E., Alquier, D., Fried, M. & Petrik, P., Nov 28 2014, In : Thin Solid Films. 571, P3, p. 567-572 6 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
6 Citations (Scopus)

High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics

Shan, A., Fried, M., Juhász, G., Major, C., Polgár, O., Németh, Á., Petrik, P., Dahal, L. R., Chen, J., Huang, Z., Podraza, N. J. & Collins, R. W., Jan 1 2014, In : IEEE Journal of Photovoltaics. 4, 1, p. 355-361 7 p., 6644259.

Research output: Contribution to journalArticle

23 Citations (Scopus)
32 Citations (Scopus)

On-line monitoring of solar cell module production by ellipsometry technique

Fried, M., Nov 28 2014, In : Thin Solid Films. 571, P3, p. 345-355 11 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Resolving lateral and vertical structures by ellipsometry using wavelength range scan

Petrik, P., Agocs, E., Volk, J., Lukacs, I., Fodor, B., Kozma, P., Lohner, T., Oh, S., Wakayama, Y., Nagata, T. & Fried, M., Nov 28 2014, In : Thin Solid Films. 571, P3, p. 579-583 5 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)
2013

Comparative measurements on atomic layer deposited Al2O 3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

Petrik, P., Gumprecht, T., Nutsch, A., Roeder, G., Lemberger, M., Juhasz, G., Polgar, O., Major, C., Kozma, P., Janosov, M., Fodor, B., Agocs, E. & Fried, M., Aug 31 2013, In : Thin Solid Films. 541, p. 131-135 5 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)

M-line spectroscopic, spectroscopic ellipsometric and microscopic measurements of optical waveguides fabricated by MeV-energy N+ ion irradiation for telecom applications

Bányász, I., Berneschi, S., Fried, M., Lohner, T., Conti, G. N., Righini, G. C., Pelli, S. & Zolnai, Z., Aug 31 2013, In : Thin Solid Films. 541, p. 3-8 6 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
1 Citation (Scopus)
2012

Formation of slab waveguides in eulytine type BGO and CaF 2 crystals by implantation of MeV nitrogen ions

Bányász, I., Berneschi, S., Khánh, N. Q., Lohner, T., Lengyel, K., Fried, M., Péter, Á., Petrik, P., Zolnai, Z., Watterich, A., Nunzi-Conti, G., Pelli, S. & Righini, G. C., Sep 1 2012, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 286, p. 80-84 5 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)

MeV energy N +-Implanted planar optical waveguides in Er-doped tungsten-tellurite glass operating at 1.55 μm

Bányász, I., Berneschi, S., Bettinelli, M., Brenci, M., Fried, M., Khanh, N. Q., Lohner, T., Conti, G. N., Pelli, S., Petrik, P., Righini, G. C., Speghini, A., Watterich, A. & Zolnai, Z., May 22 2012, In : IEEE Photonics Journal. 4, 3, p. 721-727 7 p., 6185629.

Research output: Contribution to journalArticle

20 Citations (Scopus)

Various nanostructures on macroscopically large areas prepared by tunable ion-swelling

Nagy, N., Zolnai, Z., Deák, A., Fried, M. & Bársony, I., Aug 1 2012, In : Journal of Nanoscience and Nanotechnology. 12, 8, p. 6712-6717 6 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
2011

Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si

Mohacsi, I., Petrik, P., Fried, M., Lohner, T., Van Den Berg, J. A., Reading, M. A., Giubertoni, D., Barozzi, M. & Parisini, A., Feb 28 2011, In : Thin Solid Films. 519, 9, p. 2847-2851 5 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry

Petrik, P., Zolnai, Z., Polgar, O., Fried, M., Betyak, Z., Agocs, E., Lohner, T., Werner, C., Röppischer, M. & Cobet, C., Feb 28 2011, In : Thin Solid Films. 519, 9, p. 2791-2794 4 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Expanded beam (macro-imaging) ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P., Polgár, O., Horváth, Z. & Nutsch, A., Feb 28 2011, In : Thin Solid Films. 519, 9, p. 2730-2736 7 p.

Research output: Contribution to journalArticle

20 Citations (Scopus)

In-depth characterization and computational 3D reconstruction of flagellar filament protein layer structure based on in situ spectroscopic ellipsometry measurements

Kozma, P., Kozma, D., Nemeth, A., Jankovics, H., Kurunczi, S., Horvath, R., Vonderviszt, F., Fried, M. & Petrik, P., Jun 1 2011, In : Applied Surface Science. 257, 16, p. 7160-7166 7 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)

Optical characterization of nanocrystals in silicon rich oxide superlattices and porous silicon

Agocs, E., Petrik, P., Milita, S., Vanzetti, L., Gardelis, S., Nassiopoulou, A. G., Pucker, G., Balboni, R. & Fried, M., Feb 28 2011, In : Thin Solid Films. 519, 9, p. 3002-3005 4 p.

Research output: Contribution to journalArticle

12 Citations (Scopus)

Slab optical waveguides in Er3-doped tellurite glass by N + ion implantation at 1.5 MeV

Berneschi, S., Brenci, M., Nunzi Conti, G., Pelli, S., Bettinelli, M., Speghini, A., Bnysz, I., Fried, M., Khanh, N. Q., Lohner, T., Petrik, P., Watterich, A. & Zolnai, Z., Jul 1 2011, In : Optical Engineering. 50, 7, 071110.

Research output: Contribution to journalArticle

6 Citations (Scopus)

Temperature dependent in situ doping of ALD ZnO

Baji, Z., Lábadi, Z., Horváth, Z. E., Fried, M., Szentpáli, B. & Bársony, I., Jul 1 2011, In : Journal of Thermal Analysis and Calorimetry. 105, 1, p. 93-99 7 p.

Research output: Contribution to journalArticle

21 Citations (Scopus)
2010

In situ ellipsometric study of surface immobilization of flagellar filaments

Kurunczi, S., Németh, A., Hülber, T., Kozma, P., Petrik, P., Jankovics, H., Sebestyén, A., Vonderviszt, F., Fried, M. & Bársony, I., Oct 15 2010, In : Applied Surface Science. 257, 1, p. 319-324 6 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)

In situ spectroscopic ellipsometry study of protein immobilization on different substrates using liquid cells

Nemeth, A., Kozma, P., Hülber, T., Kurunczi, S., Horvath, R., Petrik, P., Muskotál, A., Vonderviszt, F., Hõs, C., Fried, M., Gyulai, J. & Bársony, I., Oct 1 2010, In : Sensor Letters. 8, 5, p. 730-735 6 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)
2009

Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production

Major, C., Juhász, G., Petrik, P., Horváth, Z., Polgár, O. & Fried, M., Aug 25 2009, In : Vacuum. 84, 1, p. 119-122 4 p.

Research output: Contribution to journalArticle

13 Citations (Scopus)

Fabrication of channel waveguides in Er3+-doped tellurite glass via N+ ion implantation

Khánh, N. Q., Berneschi, S., Bányász, I., Brenci, M., Fried, M., Nunzi Conti, G., Pászti, F., Pelli, S., Righini, G. C. & Watterich, A., Jun 15 2009, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 267, 12-13, p. 2327-2330 4 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)
5 Citations (Scopus)

Nanocrystal characterization by ellipsometry in porous silicon using model dielectric function

Petrik, P., Fried, M., Vazsonyi, E., Basa, P., Lohner, T., Kozma, P. & Makkai, Z., Feb 9 2009, In : Journal of Applied Physics. 105, 2, 024908.

Research output: Contribution to journalArticle

26 Citations (Scopus)

Optical and electrical characterization of aluminium doped ZnO layers

Major, C., Nemeth, A., Radnoczi, G., Czigany, Z., Fried, M., Labadi, Z. & Barsony, I., Aug 15 2009, In : Applied Surface Science. 255, 21, p. 8907-8912 6 p.

Research output: Contribution to journalArticle

36 Citations (Scopus)
7 Citations (Scopus)
2008
2 Citations (Scopus)
21 Citations (Scopus)

Spectroscopic ellipsometry study of transparent conductive ZnO layers for CIGS solar cell applications

Németh, Á., Major, C., Fried, M., Lábadi, Z. & Bársony, I., Aug 30 2008, In : Thin Solid Films. 516, 20, p. 7016-7020 5 p.

Research output: Contribution to journalArticle

23 Citations (Scopus)
2007

Ion beam irradiated channel waveguides in Er3+ -doped tellurite glass

Berneschi, S., Conti, G. N., Bányász, I., Watterich, A., Khanh, N. Q., Fried, M., Pászti, F., Brenci, M., Pelli, S. & Righini, G. C., Mar 30 2007, In : Applied Physics Letters. 90, 12, 121136.

Research output: Contribution to journalArticle

61 Citations (Scopus)
19 Citations (Scopus)
2006

Dielectric function of disorder in high-fluence helium-implanted silicon

Petrik, P., Fried, M., Lohner, T., Khánh, N. Q., Basa, P., Polgár, O., Major, C., Gyulai, J., Cayrel, F. & Alquier, D., Dec 1 2006, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 253, 1-2, p. 192-195 4 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)

Ellipsometric characterization of nanocrystals in porous silicon

Petrik, P., Fried, M., Vázsonyi, É., Lohner, T., Horváth, E., Polgár, O., Basa, P., Bársony, I. & Gyulai, J., Oct 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 200-203 4 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)
29 Citations (Scopus)

Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Polgár, O., Petrik, P., Lohner, T. & Fried, M., Oct 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 57-64 8 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)

Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

Fried, M., Petrik, P., Horváth, Z. E., Lohner, T., Schmidt, C., Schneider, C. & Ryssel, H., Oct 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 349-353 5 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
2005

Optical models for cavity profiles in high-dose helium-implanted and annealed silicon measured by ellipsometry

Petrik, P., Fried, M., Lohner, T., Polgár, O., Gyulai, J., Cayrel, F. & Alquier, D., Jul 18 2005, In : Journal of Applied Physics. 97, 12, 123514.

Research output: Contribution to journalArticle

7 Citations (Scopus)

Optical models for the ellipsometric characterisation of porous silicon structures

Petrik, P., Vázsonyi, É., Fried, M., Volk, J., Andrews, G. T., Tóth, A. L., Daróczi, C. S., Bársony, I. & Gyulai, J., Nov 7 2005, In : Physica Status Solidi C: Conferences. 2, 9, p. 3319-3323 5 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)