• 1896 Citations
  • 21 h-Index
1982 …2020

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2019

Swift heavy ion irradiated planar waveguides in a rare earth doped tungsten Tellurite glass and a tungstate crystal

Bányász, I., Nagy, G. U. L., Rajta, I., Havránek, V., Vosecek, V., Fried, M., Petrik, P., Agócs, E., Kalas, B., Veres, M. & Holomb, R., Dec 10 2019, Proceedings of the International Conference of Computational Methods in Sciences and Engineering 2019, ICCMSE 2019. Simos, T. E., Simos, T. E., Simos, T. E., Kalogiratou, Z. & Monovasilis, T. (eds.). American Institute of Physics Inc., 040002. (AIP Conference Proceedings; vol. 2186).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2017

Design, Ion beam fabrication and test of integrated optical elements

Bányász, I., Pelli, S., Nunzi-Conti, G., Righini, G. C., Berneschi, S., Szilágyi, E., Németh, A., Fried, M., Petrik, P., Agócs, E., Kalas, B., Zolnai, Z., Khanh, N. Q., Rajta, I., Nagy, G. U. L., Havranek, V., Vosecek, V., Veres, M. & Himics, L., Jan 1 2017, PHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology. Ribeiro, P. A. & Raposo, M. (eds.). SciTePress, Vol. 2017-January. p. 279-285 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Recent progress in ion beam fabrication of integrated optical elements

Banyasz, I., Nagy, G. U. L., Havranek, V., Vosecek, V., Agocs, E., Fried, M., Rakovics, V. & Pelli, S., Sep 1 2017, ICTON 2017 - 19th International Conference on Transparent Optical Networks. IEEE Computer Society, 8024871

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

The use of ion beam techniques for the fabrication of integrated optical elements

Banyasz, I., Berneschi, S., Fried, M., Havranek, V., Khanh, N. Q., Nagy, G. U. L., Nemeth, A., Nunzi-Conti, G., Pelli, S., Rajta, I., Righini, C., Szilágyi, E., Veres, M. & Zolnai, Z., Aug 23 2016, 2016 18th International Conference on Transparent Optical Networks, ICTON 2016. IEEE Computer Society, Vol. 2016-August. 7550712

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2015

Expanded beam spectro-ellipsometry for big area on-line monitoring

Fried, M., Major, C., Juhasz, G., Petrik, P. & Horvath, Z., 2015, Proceedings of SPIE - The International Society for Optical Engineering. SPIE, Vol. 9525. 95251S

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High speed spectroscopic ellipsometry technique for on-line monitoring in large area thin layer production

Major, C., Juhasz, G., Labadi, Z. & Fried, M., Dec 14 2015, 2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015. Institute of Electrical and Electronics Engineers Inc., 7355640

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Petrik, P., Fodor, B., Agocs, E., Kozma, P., Nador, J., Kumar, N., Endres, J., Juhasz, G., Major, C., Pereira, S. F., Lohner, T., Urbach, H. P., Bodermann, B. & Fried, M., Jan 1 2015, Modeling Aspects in Optical Metrology V. Silver, R. M., Bodermann, B. & Frenner, K. (eds.). SPIE, 95260S. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9526).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Multiple angle of incidence, spectroscopic, plasmon-enhanced, internal reflection ellipsometry for the characterization of solid-liquid interface processes

Petrik, P., Agocs, E., Kalas, B., Kozma, P., Fodor, B., Nador, J., Major, C. & Fried, M., Jan 1 2015, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II. Grilli, S., Ferraro, P., Ritsch-Marte, M. & Stifter, D. (eds.). SPIE, 95290W. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9529).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2014

Composite polymeric-inorganic waveguide fabricated by injection molding for biosensing applications

Dortu, F., Bernier, D., Cestier, I., Vandormael, D., Emmerechts, C., Fissi, L. E., Francis, L., Nittler, L., Houssiau, L., Fodor, B., Agocs, E., Petrik, P. & Fried, M., Jan 1 2014, ICTON 2014 - 16th International Conference on Transparent Optical Networks. IEEE Computer Society, 6876325. (International Conference on Transparent Optical Networks).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Optical characterization of laterally and vertically structured oxides and semiconductors

Petrik, P., Kumar, N., Agocs, E., Fodor, B., Pereira, S. F., Lohner, T., Fried, M. & Urbach, H. P., Jan 1 2014, Oxide-Based Materials and Devices V. SPIE, 89870E. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8987).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2013

Single- and double-energy N+ - Irradiated planar waveguides in eulytine and sillenite type BGO crystals

Bányász, I., Zolnai, Z., Pelli, S., Berneschi, S., Fried, M., Lohner, T., Nunzi-Conti, G. & Righini, G. C., May 30 2013, Integrated Optics: Devices, Materials, and Technologies XVII. 862705. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8627).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2012

Application of a dual-spectral-range, divergent-beam spectroscopic ellipsometer for high-speed mapping of large-area, laterally-inhomogeneous, photovoltaic multilayers

Fried, M., Juhasz, G., Major, C., Nemeth, A., Petrik, P., Polgar, O., Salupo, C., Dahal, L. R. & Collins, R. W., Jan 1 2012, Advanced Materials Processing for Scalable Solar-Cell Manufacturing. p. 157-162 6 p. (Materials Research Society Symposium Proceedings; vol. 1323).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors

Petrik, P., Egger, H., Eiden, S., Agocs, E., Fried, M., Pecz, B., Kolari, K., Aalto, T., Horvath, R. & Giannone, D., Jan 1 2012, Titanium Dioxide Nanomaterials. p. 81-87 7 p. (Materials Research Society Symposium Proceedings; vol. 1352).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Fabrication of barrier-type slab waveguides in Er 3+-doped tellurite glass by single and double energy MeV N + ion implantation

Bányász, I., Zolnai, Z., Pelli, S., Berneschi, S., Nunzi-Conti, G., Fried, M., Lohner, T., Petrik, P., Brenci, M. & Righini, G. C., Apr 17 2012, Integrated Optics: Devices, Materials, and Technologies XVI. 826406. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8264).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Optical characterization using ellipsometry of Si nanocrystal thin layers embedded in silicon oxide

Agocs, E., Petrik, P., Fried, M. & Nassiopoulou, A. G., Jan 1 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2011. p. 367-372 6 p. (Materials Research Society Symposium Proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Wide-spectral-range, expanded-beam spectroscopic ellipsometer and its application for imaging/mapping of graded nanocrystalline Si:H films

Nemeth, A., Attygalle, D., Dahal, L. R., Aryal, P., Huang, Z., Salupo, C., Petrik, P., Juhasz, G., Major, C., Polgar, O., Fried, M., Pecz, B. & Collins, R. W., Jan 1 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2011. p. 267-272 6 p. (Materials Research Society Symposium Proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2011

Characterisation of optical waveguides in BGO crystals fabricated by N + ion implantation

Pelli, S., Berneschi, S., Nunzi Conti, G., Soria, S., Righini, G. C., Banyasz, I., Lengyel, K., Peter, A., Watterich, A., Lohner, T., Fried, M. & Zolnai, Z., Sep 6 2011, 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011. 5942856. (2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2010

Characterisation of slab waveguides, fabricated in CaF2 and Er-doped tungsten-tellurite glass by MeV energy N+ ion implantation, using spectroscopic ellipsometry and m-line spectroscopy

Bányász, I., Berneschi, S., Lohner, T., Fried, M., Petrik, P., Khanh, N. Q., Zolnai, Z., Watterich, A., Bettinelli, M., Brenci, M., Nunzi-Conti, G., Pelli, S., Righini, G. C. & Speghini, A., Jul 23 2010, Silicon Photonics and Photonic Integrated Circuits II. 77190G. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7719).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2009

Dielectric function and defect structure of CdTe implanted by 350-keV Bi ions

Petrik, P., Fried, M., Zolnai, Z., Khánh, N. Q., Li, J., Collins, R. W. & Lohner, T., Dec 1 2009, Materials Research Society Symposium Proceedings - Photovoltaic Materials and Manufacturing Issues. p. 81-87 7 p. (Materials Research Society Symposium Proceedings; vol. 1123).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

High resolution depth profile analysis of ultra thin high-κ Hf based films using MEIS compared with XTEM, XRF, SE and XPS

Van Den Berg, J. A., Reading, M. A., Parisini, A., Kolbe, M., Beckhoff, B., Ladas, S., Fried, M., Petrik, P., Bailey, P., Noakes, T., Conard, T. & De Gendt, S., Dec 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 349-361 13 p. (ECS Transactions; vol. 25, no. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Homogeneity check of ion implantation in silicon by wide-angle ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P. & Battistig, G., Dec 1 2009, 17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009. 5373448. (17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium

Giubertoni, D., Pepponi, G., Beckhoff, B., Hoenicke, P., Gennaro, S., Meirer, F., Ingerle, D., Steinhauser, G., Fried, M., Petrik, P., Parisini, A., Reading, M. A., Streli, C., Van Den Berg, J. A. & Bersani, M., Nov 30 2009, Frontiers of Characterization and Metrology for Nanoelectronics - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics. p. 45-49 5 p. (AIP Conference Proceedings; vol. 1173).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Optical and electrical properties of Al doped ZnO layers measured by wide angle beam spectroscopic ellipsometry

Major, C., Juhász, G., Nemeth, A., Labadi, Z., Petrik, P., Horváth, Z. & Fried, M., Dec 1 2009, Transparent Conductors and Semiconductors for Optoelectronics. p. 31-36 6 p. (Materials Research Society Symposium Proceedings; vol. 1109).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction

Petrik, P., Milita, S., Pucker, G., Nassiopoulou, A. G., Van Den Berg, J. A., Reading, M. A., Fried, M., Lohner, T., Theodoropoulou, M., Gardelis, S., Barozzi, M., Ghulinyan, M., Lui, A., Vanzetti, L. & Picciotto, A., Dec 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 373-378 6 p. (ECS Transactions; vol. 25, no. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2008

Ellipsometry on ion implantation induced damage

Petrik, P., Lohner, T., Polgar, O. & Fried, M., Dec 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 93-101 9 p. 4690541. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Nitrogen-ion-implanted planar optical waveguides in Er-doped tellurite glass: Fabrication and characterization

Bányász, I., Berneschi, S., Cacciari, I., Fried, M., Lohner, T., Nunzi-Conti, G., Pászti, F., Pelli, S., Petrik, P., Righini, G. C., Watterich, A. & Zolnai, Z., Mar 31 2008, Optical Components and Materials V. 68901A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6890).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Optical and structural characterization of Erbium-doped ion-implanted tellurite glasses for active integrated optical devices

Berneschi, S., Brenci, M., Nunzi Conti, G., Pelli, S., Righini, G. C., Bettinelli, M., Speghini, A., Bányász, I., Fried, M., Khanh, N. Q., Pászti, F., Watterich, A., Leto, A., Pezzotti, G. & Porporati, A. A., Jan 1 2008, CIMTEC 2008 - Proceedings of the 3rd International Conference on Smart Materials, Structures and Systems - Smart Optics. Trans Tech Publications Ltd, p. 68-73 6 p. (CIMTEC 2008 - Proceedings of the 3rd International Conference on Smart Materials, Structures and Systems - Smart Optics; vol. 55).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2007

Channel waveguides fabrication in Er3+-doped tellurite glass by ion beam irradiation

Berneschi, S., Brenci, M., Conti, G. N., Pelli, S., Righini, G. C., Bányász, I., Watterich, A., Khanh, N. Q., Fried, M. & Pászti, F., May 24 2007, Integrated Optics: Devices, Materials, and Technologies XI. 647509. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6475).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2006

Spectroscopic ellipsometric study of LPCVD-deposited Si nanocrystals in SiNx and Si3N4

Basa, P., Petrik, P. & Fried, M., Dec 1 2006, Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06. p. 87-89 3 p. 4133084. (Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2002

Ellipsometric characterization of shallow damage profiles created by Xe-implantation into silicon

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N. Q., Gyulai, J. & Ramadan, E., 2002, Proceedings of the International Conference on Ion Implantation Technology. Institute of Electrical and Electronics Engineers Inc., Vol. 22-27-September-2002. p. 601-604 4 p. 1258077

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2000

Advanced optical model for the ellipsometric study of ion implantation-caused damage depth profiles in single-crystalline silicon

Petrik, P., Polgár, O., Fried, M., Lohner, T., Khánh, N. Q. & Gyulai, J., Dec 1 2000, 2000 International Conference on Ion Implantation Technology, IIT 2000 - Proceedings. p. 151-154 4 p. 924112. (Proceedings of the International Conference on Ion Implantation Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
1995

Scanning infrared microscopy study of annealing behavior of interfacial micro-voids in direct bonded silicon

Khánh, N. Q., Hámori, A., Bársony, I., Dücsó, C. & Fried, M., Jan 1 1995, ESSDERC 1995 - Proceedings of the 25th European Solid State Device Research Conference. de Graaff, H. C., de Graaff, H. C. & van Kranenburg, H. (eds.). IEEE Computer Society, p. 145-148 4 p. 5435985. (European Solid-State Device Research Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1985

ANALYSIS OF HIGH DOSE IMPLANTED SILICON BY HIGH DEPTH RESOLUTION RBS AND SPECTROSCOPIC ELLIPSOMETRY AND TEM.

Lohner, T., Mezey, G., Fried, M., Ghita, L., Ghita, C., Mertens, A., Kerkow, H., Kotai, E., Paszti, F., Banyai, F., Vizkelethy, GY., Jaroli, E., Gyulai, J. & Somogyi, M., Dec 1 1985, Materials Research Society Symposia Proceedings. Biegelsen, D. K. & Shank, C. V. (eds.). Materials Research Soc, p. 523-528 6 p. (Materials Research Society Symposia Proceedings; vol. 35).

Research output: Chapter in Book/Report/Conference proceedingConference contribution