• 586 Citations
  • 13 h-Index
19952012
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Fingerprint Dive into the research topics where M. Ádám is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 7 Similar Profiles
Porous silicon Engineering & Materials Science
porous silicon Physics & Astronomy
sensors Physics & Astronomy
Silicon Chemical Compounds
Membranes Engineering & Materials Science
Sensors Engineering & Materials Science
Ion implantation Engineering & Materials Science
membranes Physics & Astronomy

Research Output 1995 2012

  • 586 Citations
  • 13 h-Index
  • 34 Article
  • 9 Conference contribution

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411331

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wafer bonding
Electrostatic force
Silicon
Membrane structures
Bias voltage
1 Citation (Scopus)

Flexible packaging for tyre integrated shear force sensor

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Kárpáti, T., Ádám, M., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411326

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tires
Packaging
Sensors
MEMS
Rubber
4 Citations (Scopus)

Sensitivity tuning of A 3-axial piezoresistive force sensor

Molnár, D., Pongrácz, A., Ádám, M., Hajnal, Z., Timárné, V. & Battistig, G., Feb 2012, In : Microelectronic Engineering. 90, p. 40-43 4 p.

Research output: Contribution to journalArticle

mesas
Tuning
tuning
Membranes
sensitivity