M. Ádám

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Porous silicon Engineering & Materials Science

porous silicon Physics & Astronomy

sensors Physics & Astronomy

Silicon Chemical Compounds

Membranes Engineering & Materials Science

Sensors Engineering & Materials Science

Ion implantation Engineering & Materials Science

membranes Physics & Astronomy

Kárpáti, T., Pap, A., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411331

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wafer bonding

Electrostatic force

Silicon

Membrane structures

Bias voltage

1 Citations

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Kárpáti, T., Ádám, M., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411326

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tires

Packaging

Sensors

MEMS

Rubber

3 Citations

Molnár, D., Pongrácz, A., Ádám, M., Hajnal, Z., Timárné, V. & Battistig, G., Feb 2012, In : Microelectronic Engineering. 90, p. 40-43 4 p.

Research output: Contribution to journal › Article

mesas

Tuning

tuning

Membranes

sensitivity