• 1032 Citations
  • 18 h-Index
1985 …2019

Research output per year

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Research Output

  • 1032 Citations
  • 18 h-Index
  • 70 Article
  • 21 Conference contribution
  • 17 Conference article
  • 2 Editorial
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Conference contribution
2000

Ion implantation induced damage in silicon carbide studied by Non-Rutherford elastic backscattering

Szilágyi, E., Kótai, E., Khánh, N. Q., Zolnai, Z., Battistig, G., Lohner, T. & Gyulai, J., Dec 1 2000, 2000 International Conference on Ion Implantation Technology, IIT 2000 - Proceedings. p. 131-134 4 p. 924108. (Proceedings of the International Conference on Ion Implantation Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)
2003

High-Sensitivity Ion Beam Analytical Method for Studying Ion-Implanted SiC

Battistig, G., Garcia Lopez, J., Khanh, N. Q., Morilla, Y., Respaldiza, M. A. & Szilágyi, E., Jan 1 2003, Materials Science Forum. Bergman, P. & Janzén, E. (eds.). Trans Tech Publications Ltd, p. 625-628 4 p. (Materials Science Forum; vol. 433-436).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)
2005

Ion beam analysis and computer simulation of damage accumulation in nitrogen implanted 6H-SiC: Effects of channeling

Zolnai, Z., Ster, A., Khánh, N. Q., Kótai, E., Posselt, M., Battistig, G., Lohner, T. & Gyulai, J., Dec 1 2005, Silicon Carbide and Related Materials 2004, ECSCRM 2004 - Proceedings of 5th European Conference on Silicon Carbide and Related Materials. p. 637-640 4 p. (Materials Science Forum; vol. 483-485).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

RBS-channeling and EPR studies of damage in 2 MeV Al2+-implanted 6H-SiC substrates

Morilla, Y., López, J. G., Battistig, G., Cantin, J. L., Cheang-Wong, J. C., Von Bardeleben, H. J. & Respaldiza, M. A., Dec 1 2005, Silicon Carbide and Related Materials 2004, ECSCRM 2004 - Proceedings of 5th European Conference on Silicon Carbide and Related Materials. p. 291-294 4 p. (Materials Science Forum; vol. 483-485).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2006

Nucleation of SiC nanocrystals at the Si/SiO2 interface: Effect of the interface properties

Pongrácz, A., Battistig, G., Tóth, A. L., Makkai, Z., Dücsö, C., Josepovits, K. V. & Bársony, I., Mar 1 2006, Proceedings - ICFSI-10 - 10th International Conference on the Formation of Semiconductor Interfaces. p. 133-136 4 p. (Journal De Physique. IV : JP; vol. 132).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)
2007

Sacrificial deuterium passivation for improved interface engineering in gate stack processing

Pap, A. E., Battistig, G., Dücso, C., Bársony, I., Kamarás, K., Nenyei, Z., Dietl, W. & Kirchner, C., Dec 1 2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007. p. 57-63 7 p. 4383819. (15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2008

Heavy water in gate stack processing

Pap, A. E., Dücso, C., Kamaras, K., Battistig, G. & Bársony, I., Jan 1 2008, Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Selected papers from RTP specialists all over the world. Trans Tech Publications Ltd, p. 119-131 13 p. (Materials Science Forum; vol. 573-574).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Si surface preparation and passivation by vapor phase of heavy water

Edit Pap, A., Petrik, P., Pecz, B., Battistig, G., Barsony, I., Szekrenyes, Z., Kamaras, K., Schay, Z. & Nenyei, Z., Dec 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 219-228 10 p. 4690558. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2009

Homogeneity check of ion implantation in silicon by wide-angle ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P. & Battistig, G., Dec 1 2009, 17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009. 5373448. (17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Silicon surface preparation and passivation by vapor phase of heavy water

Pap, A. E., Nényei, Z., Battistig, G. & Bársony, I., Jan 1 2009, Ultra Clean Processing of Semiconductor Surfaces IX: UCPSS 2008. Trans Tech Publications Ltd, p. 181-184 4 p. (Solid State Phenomena; vol. 145-146).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2010

Selective growth of nanocrystalline 3C-SiC thin films on Si

Beke, D., Pongrácz, A., Battistig, G., Josepovits, K. & Pécz, B., Dec 1 2010, 2010 Wide Bandgap Cubic Semiconductors: From Growth to Devices - Proceedings of the E-MRS Symposium F. p. 23-26 4 p. (AIP Conference Proceedings; vol. 1292).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

SiC epitaxial growth on Si(100) substrates using carbon tetrabromide

Attolini, G., Bosi, M., Rossi, F., Watts, B. E., Salviati, G., Battistig, G., Dobos, L. & Pécz, B., Jan 1 2010, Silicon Carbide and Related Materials 2009: ICSCRM 2009. Trans Tech Publications Ltd, p. 139-142 4 p. (Materials Science Forum; vol. 645-648).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Thermopile as THz detector

Szentpáli, B., Basa, P., Fürjes, P., Battistig, G. & Bársony, I., Dec 20 2010, Proceedings - 10th International Conference on Laser and Fiber-Optical Networks Modeling, LFNM'2010, 2nd IEEE International Workshop on THz Radiation: Basic Research and Applications, TERA'2010. p. 275-277 3 p. 5619943. (Proceedings - 10th International Conference on Laser and Fiber-Optical Networks Modeling, LFNM'2010, 2nd IEEE International Workshop on THz Radiation: Basic Research and Applications, TERA'2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2011

THz detection by modified thermopile

Szentpáli, B., Matyi, G., Fürjes, P., László, E., Battistig, G., Bársony, I., Károlyi, G. & Berceli, T., Jul 25 2011, Smart Sensors, Actuators, and MEMS V. 80661R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2012

Deep-brain silicon multielectrodes with surface-modified Pt recording sites

Marton, G., Fekete, Z., Bakos, I., Battistig, G., Pongracz, A., Baracskay, P., Juhasz, G. & Barsony, I., Dec 1 2012, IEEE SENSORS 2012 - Proceedings. 6411325. (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A. E., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., Dec 1 2012, IEEE SENSORS 2012 - Proceedings. 6411331. (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Flexible packaging for tyre integrated shear force sensor

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Karpati, T., Adam, M., Battistig, G. & Bársony, I., Dec 1 2012, IEEE SENSORS 2012 - Proceedings. 6411326. (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

The influence of C 3H 8 and CBr 4 on structural and morphological properties of 3C-SiC layers

Attolini, G., Bosi, M., Watts, B. E., Battistig, G., Dobos, L. & Pécz, B., Feb 15 2012, HeteroSiC and WASMPE 2011. p. 22-26 5 p. (Materials Science Forum; vol. 711).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014

Electron microscopy study of Ni induced crystallization in amorphous Si thin films

Radnóczi, G. Z., Dodony, E., Battistig, G., Vouroutzis, N., Stoemenos, J., Frangis, N., Kovács, A. & Pécz, B., Jan 1 2014, International Conferences and Exhibition on Nanotechnologies and Organic Electronics, NANOTEXNOLOGY 2014 - Proceedings of NN 2014 and ISFOE 2014. Logothetidis, S., Laskarakis, A. & Gravalidis, C. (eds.). American Institute of Physics Inc., p. 31-37 7 p. (AIP Conference Proceedings; vol. 1646).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Open Access
2016

3D force sensors for laparoscopic surgery tool

Rado, J., Dücső, C., Battistig, G., Szebenyi, G., Fürjes, P., Nawrat, Z. & Rohr, K., Jul 15 2016, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc., 7514829

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Electron Microscopy Study on the Influence of B-implantation on Ni Induced Lateral Crystallization in Amorphous Si

Vouroutzis, N., Radnóczi, G. Z., Dodony, E., Battistig, G., Stoemenos, J., Pécz, B. & Frangis, N., 2016, Materials Today: Proceedings. 3 ed. Elsevier Ltd, Vol. 3. p. 825-831 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution