• 1025 Citations
  • 18 h-Index
1985 …2019

Research output per year

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Research Output

  • 1025 Citations
  • 18 h-Index
  • 70 Article
  • 21 Conference contribution
  • 17 Conference article
  • 2 Editorial
2019

Novel method for the production of SiC micro and nanopatterns

Racz, A. S., Zambo, D., Dobrik, G., Lukacs, I., Zolnai, Z., Nemeth, A., Panjan, P., Deák, A., Battistig, G. & Menyhárd, M., Aug 25 2019, In : Surface and Coatings Technology. 372, p. 427-433 7 p.

Research output: Contribution to journalArticle

2017

Spatially and spectrally stable semiconductor light sources for near infrared spectroscopy

Nádas, J., Rakovics, V., Réti, I., Dücso, C. & Battistig, G., Jan 1 2017, In : Materials Today: Proceedings. 4, 7, p. 7107-7113 7 p.

Research output: Contribution to journalArticle

2016

3D force sensors for laparoscopic surgery tool

Rado, J., Dücső, C., Battistig, G., Szebenyi, G., Fürjes, P., Nawrat, Z. & Rohr, K., Jul 15 2016, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc., 7514829

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Electron Microscopy Study on the Influence of B-implantation on Ni Induced Lateral Crystallization in Amorphous Si

Vouroutzis, N., Radnóczi, G. Z., Dodony, E., Battistig, G., Stoemenos, J., Pécz, B. & Frangis, N., 2016, Materials Today: Proceedings. 3 ed. Elsevier Ltd, Vol. 3. p. 825-831 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanoscale SiC production by ballistic ion beam mixing of C/Si multilayer structures

Battistig, G., Zolnai, Z., Németh, A., Panjan, P. & Menyhárd, M., Apr 7 2016, In : Journal of Physics D: Applied Physics. 49, 18, 185303.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Structural characterization of nanostructures grown by Ni metal induced lateral crystallization of amorphous-Si

Radnóczi, G. Z., Dodony, E., Battistig, G., Vouroutzis, N., Kavouras, P., Stoemenos, J., Frangis, N., Kovács, A. & Pécz, B., Feb 14 2016, In : Journal of Applied Physics. 119, 6, 065303.

Research output: Contribution to journalArticle

6 Citations (Scopus)

Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing

Battistig, G., Gurbán, S., Sáfrán, G., Sulyok, A., Németh, A., Panjan, P., Zolnai, Z. & Menyhárd, M., Sep 25 2016, In : Surface and Coatings Technology. 302, p. 320-326 7 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)
2015

Determination of migration of ion-implanted Ar and Zn in silica by backscattering spectrometry

Szilágyi, E., Bányász, I., Kótai, E., Németh, A., Major, C., Fried, M. & Battistig, G., Mar 4 2015, In : Radiation Effects and Defects in Solids. 170, 3, p. 229-237 9 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Introduction: REM7 - 2014

Battistig, G., Mar 4 2015, In : Radiation Effects and Defects in Solids. 170, 3, p. 153-154 2 p.

Research output: Contribution to journalEditorial

2014

Electron microscopy study of Ni induced crystallization in amorphous Si thin films

Radnóczi, G. Z., Dodony, E., Battistig, G., Vouroutzis, N., Stoemenos, J., Frangis, N., Kovács, A. & Pécz, B., Jan 1 2014, International Conferences and Exhibition on Nanotechnologies and Organic Electronics, NANOTEXNOLOGY 2014 - Proceedings of NN 2014 and ISFOE 2014. Logothetidis, S., Laskarakis, A. & Gravalidis, C. (eds.). American Institute of Physics Inc., p. 31-37 7 p. (AIP Conference Proceedings; vol. 1646).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Open Access

Membrane platforms for sensors

Bársony, I., Dücso, C., Fürjes, P., Riesz, F., Hajnal, Z. & Battistig, G., Jan 1 2014, In : Procedia Engineering. 87, p. 871-878 8 p.

Research output: Contribution to journalConference article

Open Access
3 Citations (Scopus)

Packaging of a 3-axial piezoresistive force sensor with backside contacts

Kárpáti, T., Kulinyi, S., Végvári, R., Ferencz, J., Nagy, A., Pap, A. E. & Battistig, G., Jun 2014, In : Microsystem Technologies. 20, 6, p. 1063-1068 6 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)
2013

In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths

Marton, G., Fekete, Z., Fiath, R., Baracskay, P., Ulbert, I., Juhasz, G., Battistig, G. & Pongracz, A., Aug 19 2013, In : IEEE Sensors Journal. 13, 9, p. 3263-3269 7 p., 6509429.

Research output: Contribution to journalArticle

8 Citations (Scopus)
2012

Deep-brain silicon multielectrodes for simultaneous neural recording and drug delivery

Pongrácz, A., Fekete, Z., Marton, G., Fiáth, R., Fürjes, P., Ulbert, I. & Battistig, G., Jan 1 2012, In : Procedia Engineering. 47, p. 281-284 4 p.

Research output: Contribution to journalConference article

Open Access
1 Citation (Scopus)

Deep-brain silicon multielectrodes with surface-modified Pt recording sites

Marton, G., Fekete, Z., Bakos, I., Battistig, G., Pongracz, A., Baracskay, P., Juhasz, G. & Barsony, I., Dec 1 2012, IEEE SENSORS 2012 - Proceedings. 6411325. (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Effects of the focused ion beam parameters on nanopore milling in solid state membranes

Fürjes, P., Fekete, Z., Illés, L., Tóth, A. L., Battistig, G. & Gyurcsányi, R. E., Jan 1 2012, In : Procedia Engineering. 47, p. 684-687 4 p.

Research output: Contribution to journalConference article

Open Access
5 Citations (Scopus)

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A. E., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., Dec 1 2012, IEEE SENSORS 2012 - Proceedings. 6411331. (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Flexible packaging for tyre integrated shear force sensor

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Karpati, T., Adam, M., Battistig, G. & Bársony, I., Dec 1 2012, IEEE SENSORS 2012 - Proceedings. 6411326. (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Improved process flow for buried channel fabrication in silicon

Fekete, Z., Pongrácz, A., Fürjes, P. & Battistig, G., Mar 1 2012, In : Microsystem Technologies. 18, 3, p. 353-358 6 p.

Research output: Contribution to journalArticle

13 Citations (Scopus)

Orientation dependent growth of SiC nanocrystals at the SiO 2/Si interface

Battistig, G., Jan 1 2012, In : Thin Solid Films. 520, 6, p. 1973-1977 5 p.

Research output: Contribution to journalArticle

Sensitivity tuning of A 3-axial piezoresistive force sensor

Molnár, D., Pongrácz, A., Ádám, M., Hajnal, Z., Timárné, V. & Battistig, G., Feb 1 2012, In : Microelectronic Engineering. 90, p. 40-43 4 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)

The influence of C 3H 8 and CBr 4 on structural and morphological properties of 3C-SiC layers

Attolini, G., Bosi, M., Watts, B. E., Battistig, G., Dobos, L. & Pécz, B., Feb 15 2012, HeteroSiC and WASMPE 2011. p. 22-26 5 p. (Materials Science Forum; vol. 711).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Thermopile-based THz antenna

Szentpáli, B., Matyi, G., Fü Rjes, P., László, E., Battistig, G., Bársony, I., Károlyi, G. & Berceli, T., Aug 1 2012, In : Microsystem Technologies. 18, 7-8, p. 849-856 8 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Time of flight elastic recoil detection analysis with toroidal electrostatic analyzer for ultra shallow dopant profiling

Abo, S., Horiuchi, H., Wakaya, F., Battistig, G., Lohner, T. & Takai, M., Jun 1 2012, In : Surface and Interface Analysis. 44, 6, p. 732-735 4 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
2011

A novel multisite silicon probe for high quality laminar neural recordings

Grand, L., Pongrácz, A., Vázsonyi, É., Márton, G., Gubán, D., Fiáth, R., Kerekes, B. P., Karmos, G., Ulbert, I. & Battistig, G., Mar 1 2011, In : Sensors and Actuators, A: Physical. 166, 1, p. 14-21 8 p.

Research output: Contribution to journalArticle

25 Citations (Scopus)

A novel multisite silicon probe for laminar neural recordings

Fiáth, R., Grand, L., Kerekes, B., Pongrácz, A., Vázsonyi, É., Márton, G., Battistig, G. & Ulbert, I., Jan 1 2011, In : Procedia Computer Science. 7, p. 310-311 2 p.

Research output: Contribution to journalConference article

Open Access
2 Citations (Scopus)

Characterisation of solid-state gold nanopores applicable for biochemical sensing

Gyurcsányi, R. E., Makra, I., Jágerszki, G., Bakk, D. T., Fekete, Z., Battistig, G., Bársony, I. & Fürjes, P., Dec 1 2011, In : Procedia Engineering. 25, p. 904-907 4 p.

Research output: Contribution to journalConference article

Open Access
15 Citations (Scopus)

THz detection by modified thermopile

Szentpáli, B., Matyi, G., Fürjes, P., László, E., Battistig, G., Bársony, I., Károlyi, G. & Berceli, T., Jul 25 2011, Smart Sensors, Actuators, and MEMS V. 80661R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2010
18 Citations (Scopus)

CBr4 as precursor for VPE growth of cubic silicon carbide

Watts, B. E., Bosi, M., Attolini, G., Battistig, G., Dobos, L. & Pécz, B., Jun 1 2010, In : Crystal Research and Technology. 45, 6, p. 583-588 6 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Effect of deuterium on passivation of Si surfaces

Mizsei, J., Pap, A. E., Gillemot, K. & Battistig, G., Jul 15 2010, In : Applied Surface Science. 256, 19, p. 5765-5770 6 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)

Ion implantation enhanced formation of 3C-SiC grains at the SiO 2/Si interface after annealing in CO gas

Pécz, B., Stoemenos, J., Voelskow, M., Skorupa, W., Dobos, L., Pongrcz, A. & Battistig, G., Jan 1 2010, In : Journal of Physics: Conference Series. 209, 012045.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Millimeter wave detection by thermopile antenna

Szentpáli, B., Basa, P., Fürjes, P., Battistig, G., Bársony, I., Károlyi, G. & Berceli, T., 2010, In : Procedia Engineering. 5, p. 564-567 4 p.

Research output: Contribution to journalArticle

Open Access
2 Citations (Scopus)

Selective growth of nanocrystalline 3C-SiC thin films on Si

Beke, D., Pongrácz, A., Battistig, G., Josepovits, K. & Pécz, B., Dec 1 2010, 2010 Wide Bandgap Cubic Semiconductors: From Growth to Devices - Proceedings of the E-MRS Symposium F. p. 23-26 4 p. (AIP Conference Proceedings; vol. 1292).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

SiC epitaxial growth on Si(100) substrates using carbon tetrabromide

Attolini, G., Bosi, M., Rossi, F., Watts, B. E., Salviati, G., Battistig, G., Dobos, L. & Pécz, B., Jan 1 2010, Silicon Carbide and Related Materials 2009: ICSCRM 2009. Trans Tech Publications Ltd, p. 139-142 4 p. (Materials Science Forum; vol. 645-648).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Thermopile antennas for detection of millimeter waves

Szentpáli, B., Basa, P., Fürjes, P., Battistig, G., Bársony, I., Károlyi, G., Berceli, T., Rymanov, V. & Stöhr, A., Apr 12 2010, In : Applied Physics Letters. 96, 13, 133507.

Research output: Contribution to journalArticle

18 Citations (Scopus)

Thermopile as THz detector

Szentpáli, B., Basa, P., Fürjes, P., Battistig, G. & Bársony, I., Dec 20 2010, Proceedings - 10th International Conference on Laser and Fiber-Optical Networks Modeling, LFNM'2010, 2nd IEEE International Workshop on THz Radiation: Basic Research and Applications, TERA'2010. p. 275-277 3 p. 5619943. (Proceedings - 10th International Conference on Laser and Fiber-Optical Networks Modeling, LFNM'2010, 2nd IEEE International Workshop on THz Radiation: Basic Research and Applications, TERA'2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2009

An 18O study of the interaction between carbon monoxide and dry thermal SiO2 at 1100 °c

Cavellin, C. D., Trimaille, I., Ganem, J. J., D'Angelo, M., Vickridge, I., Pongracz, A. & Battistig, G., Feb 24 2009, In : Journal of Applied Physics. 105, 3, 033501.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Dynamic annealing study of SiC epilayers implanted with Ni ions at different temperatures

García López, J., Morilla, Y., Cheang-Wong, J. C., Battistig, G., Zolnai, Z. & Cantin, J. L., Apr 15 2009, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 267, 7, p. 1097-1100 4 p.

Research output: Contribution to journalArticle

Epitaxial 3C-SiC nanocrystal formation at the SiO2/Si interface by combined carbon implantation and annealing in CO atmosphere

Ṕcz, B., Stoemenos, J., Voelskow, M., Skorupa, W., Dobos, L., Pongrácz, A. & Battistig, G., May 8 2009, In : Journal of Applied Physics. 105, 8, 083508.

Research output: Contribution to journalArticle

Homogeneity check of ion implantation in silicon by wide-angle ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P. & Battistig, G., Dec 1 2009, 17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009. 5373448. (17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Isotopic tracing study of the growth of silicon carbide nanocrystals at the SiO2 /Si interface by CO annealing

Pongracz, A., Hoshino, Y., D'Angelo, M., Cavellin, C. D., Ganem, J. J., Trimaille, I., Battistig, G., Josepovits, K. V. & Vickridge, I., Aug 12 2009, In : Journal of Applied Physics. 106, 2, 024302.

Research output: Contribution to journalArticle

9 Citations (Scopus)
7 Citations (Scopus)

Silicon surface preparation and passivation by vapor phase of heavy water

Pap, A. E., Nényei, Z., Battistig, G. & Bársony, I., Jan 1 2009, Ultra Clean Processing of Semiconductor Surfaces IX: UCPSS 2008. Trans Tech Publications Ltd, p. 181-184 4 p. (Solid State Phenomena; vol. 145-146).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2008

Complex dielectric function of ion implantation amorphized SiC determined by spectroscopic ellipsometry

Lohner, T., Zolnai, Z., Petrik, P., Battistig, G., Garcia López, J., Morilla, Y., Koós, A., Osváth, Z. & Fried, M., Dec 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1374-1377 4 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)

Heavy water in gate stack processing

Pap, A. E., Dücso, C., Kamaras, K., Battistig, G. & Bársony, I., Jan 1 2008, Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Selected papers from RTP specialists all over the world. Trans Tech Publications Ltd, p. 119-131 13 p. (Materials Science Forum; vol. 573-574).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
21 Citations (Scopus)

Si surface preparation and passivation by vapor phase of heavy water

Edit Pap, A., Petrik, P., Pecz, B., Battistig, G., Barsony, I., Szekrenyes, Z., Kamaras, K., Schay, Z. & Nenyei, Z., Dec 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 219-228 10 p. 4690558. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Summary of "IAEA intercomparison of IBA software"

Barradas, N. P., Arstila, K., Battistig, G., Bianconi, M., Dytlewski, N., Jeynes, C., Kótai, E., Lulli, G., Mayer, M., Rauhala, E., Szilágyi, E. & Thompson, M., Apr 1 2008, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 266, 8, p. 1338-1342 5 p.

Research output: Contribution to journalArticle

50 Citations (Scopus)