• 1582 Citations
  • 19 h-Index
1981 …2009
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Research Output 1981 2009

  • 1582 Citations
  • 19 h-Index
  • 104 Article
  • 11 Conference contribution
2009
10 Citations (Scopus)

Fabrication of channel waveguides in Er3+-doped tellurite glass via N+ ion implantation

Khánh, N. Q., Berneschi, S., Bányász, I., Brenci, M., Fried, M., Nunzi Conti, G., Pászti, F., Pelli, S., Righini, G. C. & Watterich, A., Jun 15 2009, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 267, 12-13, p. 2327-2330 4 p.

Research output: Contribution to journalArticle

Ion implantation
ion implantation
Waveguides
waveguides
Fabrication
2008
4 Citations (Scopus)

Comparative study of the oxide scale thermally grown on titanium alloys by ion beam analysis techniques and scanning electron microscopy

Gutiérrez, A., Pászti, F., Climent-Font, A., Jiménez, J. A. & López, M. F., Aug 2008, In : Journal of Materials Research. 23, 8, p. 2245-2253 9 p.

Research output: Contribution to journalArticle

titanium alloys
Titanium alloys
Oxides
Ion beams
ion beams
9 Citations (Scopus)
Helium
Backscattering
Silicon Dioxide
Spectrometry
Protons
1 Citation (Scopus)

Nitrogen-ion-implanted planar optical waveguides in Er-doped tellurite glass: Fabrication and characterization

Bányász, I., Berneschi, S., Cacciari, I., Fried, M., Lohner, T., Nunzi-Conti, G., Pászti, F., Pelli, S., Petrik, P., Righini, G. C., Watterich, A. & Zolnai, Z., 2008, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6890. 68901A

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Planar waveguides
nitrogen ions
Optical waveguides
optical waveguides
Nitrogen
2 Citations (Scopus)

Optical and structural characterization of Erbium-doped ion-implanted tellurite glasses for active integrated optical devices

Berneschi, S., Brenci, M., Nunzi Conti, G., Pelli, S., Righini, G. C., Bettinelli, M., Speghini, A., Bányász, I., Fried, M., Khanh, N. Q., Pászti, F., Watterich, A., Leto, A., Pezzotti, G. & Porporati, A. A., 2008, CIMTEC 2008 - Proceedings of the 3rd International Conference on Smart Materials, Structures and Systems - Smart Optics. Vol. 55. p. 68-73 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Erbium
Optical devices
Spectroscopy
Ions
Ion implantation
5 Citations (Scopus)

Structural characterization of Fe/Ag bilayers by RBS and AFM

Tunyogi, A., Tanczikó, F., Osváth, Z. & Pászti, F., Nov 2008, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 266, 22, p. 4916-4920 5 p.

Research output: Contribution to journalArticle

Rutherford backscattering spectroscopy
Spectrometry
Atomic force microscopy
backscattering
atomic force microscopy
2007
1 Citation (Scopus)

Channel waveguides fabrication in Er3+-doped tellurite glass by ion beam irradiation

Berneschi, S., Brenci, M., Conti, G. N., Pelli, S., Righini, G. C., Bányász, I., Watterich, A., Khanh, N. Q., Fried, M. & Pászti, F., 2007, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6475. 647509

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ion beams
Waveguides
ion beams
Irradiation
waveguides
60 Citations (Scopus)

Ion beam irradiated channel waveguides in Er3+ -doped tellurite glass

Berneschi, S., Conti, G. N., Bányász, I., Watterich, A., Khanh, N. Q., Fried, M., Pászti, F., Brenci, M., Pelli, S. & Righini, G. C., 2007, In : Applied Physics Letters. 90, 12, 121136.

Research output: Contribution to journalArticle

ion beams
waveguides
glass
fabrication
nitrogen ions
2006
7 Citations (Scopus)
Molecular beams
Backscattering
Spectrometry
molecular beams
Atomic force microscopy
5 Citations (Scopus)

Effect of pre-implanted oxygen in Si on the retention of implanted He

Manuaba, A., Pászti, F., Ramos, A. R., Khánh, N. Q., Pécz, B., Zolnai, Z., Tunyogi, A. & Szilágyi, E., Aug 2006, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 249, 1-2 SPEC. ISS., p. 150-152 3 p.

Research output: Contribution to journalArticle

fluence
Ions
Oxygen
oxygen
Backscattering
4 Citations (Scopus)

In-depth RBS study of optical layers based on nanostructured silicon

Torres-Costa, V., Martín-Palma, R. J., Pászti, F., Climent-Font, A. & Martínez-Duart, J. M., Jul 15 2006, In : Journal of Non-Crystalline Solids. 352, 23-25, p. 2521-2525 5 p.

Research output: Contribution to journalArticle

Porous silicon
Rutherford backscattering spectroscopy
Silicon
porous silicon
backscattering
12 Citations (Scopus)
Ions
Crystals
crystals
ions
Rutherford backscattering spectroscopy
2005
34 Citations (Scopus)

Magnetic nanowire arrays in anodic alumina membranes: Rutherford backscattering characterization

Hernández-Vélez, M., Pirota, K. R., Pászti, F., Navas, D., Climent, A. & Vázquez, M., May 2005, In : Applied Physics A: Materials Science and Processing. 80, 8, p. 1701-1706 6 p.

Research output: Contribution to journalArticle

Aluminum Oxide
Rutherford backscattering spectroscopy
Nanowires
backscattering
nanowires
9 Citations (Scopus)

Optical and in-depth RBS characterization of porous silicon interference filters

Torres-Costa, V., Pászti, F., Climent-Font, A., Martín-Palma, R. J. & Martínez-Duart, J. M., 2005, In : Journal of the Electrochemical Society. 152, 11

Research output: Contribution to journalArticle

Porous silicon
Rutherford backscattering spectroscopy
porous silicon
homogeneity
backscattering
10 Citations (Scopus)

Porosity profile determination of porous silicon interference filters by RBS

Torres-Costa, V., Pászti, F., Climent-Font, A., Martín-Palma, R. J. & Martínez-Duart, J. M., 2005, Physica Status Solidi C: Conferences. 9 ed. Vol. 2. p. 3208-3212 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

porous silicon
backscattering
porosity
interference
filters
13 Citations (Scopus)

Positronium trapping in porous solids: Means and limitations for structural studies

Kajcsos, Z., Liszkay, L., Duplâtre, G., Varga, L., Lohonyai, L., Pászti, F., Szilágyi, E., Lázár, K., Kótai, E., Páł, B. G., Beyer, H. K., Caullet, P., Patarin, J., Azenha, M. E., Gordo, P. M., Gil, C. L., De Lima, A. P. & Marques, M. F. F., May 2005, In : Acta Physica Polonica A. 107, 5, p. 729-737 9 p.

Research output: Contribution to journalArticle

positronium
trapping
life (durability)
positron annihilation
zeolites
3 Citations (Scopus)

RBS and ERD characterization of SiON films for optical waveguide applications

Climent-Font, A., Pászti, F., Muñoz-Martín, A., Ruiz, E., Garrido, J. & Pernas, P. L., Oct 2005, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 240, 1-2, p. 440-444 5 p.

Research output: Contribution to journalArticle

Optical waveguides
Silicon
optical waveguides
Electron cyclotron resonance
Plasma enhanced chemical vapor deposition
4 Citations (Scopus)

Silicon oxynitride ECR-PECVD films for integrated optics

Pernas, P. L., Ruiz, E., Garrido, J., Piqueras, J., Pászti, F., Climent-Font, A., Litante, G. & Cantelar, E., 2005, Materials Science Forum. Vol. 480-481. p. 149-154 6 p. (Materials Science Forum; vol. 480-481).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Integrated optics
Silicon
Plasma enhanced chemical vapor deposition
Refraction
Hydrogen
2004

Eu-doped yttria and lutetia thin films grown on sapphire by PLD

Bär, S., Scheife, H., Huber, G., Gonzalo, J., Perea, A., Font, A. C., Pászti, F. & Munz, M., 2004, Materials Research Society Symposium - Proceedings. Shin, J. H., Brongersma, M., Buchal, C. & Priolo, F. (eds.). Vol. 817. p. 61-66 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yttrium oxide
Aluminum Oxide
Pulsed laser deposition
Sapphire
Thin films
79 Citations (Scopus)

First measurements with the Madrid 5 MV tandem accelerator

Climent-Font, A., Pászti, F., García, G., Fernández-Jiménez, M. T. & Agulló, F., Jun 2004, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 219-220, 1-4, p. 400-404 5 p.

Research output: Contribution to journalArticle

Particle accelerators
accelerators
Microanalysis
microanalysis
Ion beams
12 Citations (Scopus)

RBS characterization of porous silicon multilayer interference filters

Torres-Costa, V., Pászti, F., Climent-Font, A., Martín-Palma, R. J. & Martínez-Duart, J. M., 2004, In : Electrochemical and Solid-State Letters. 7, 11

Research output: Contribution to journalArticle

Porous silicon
Rutherford backscattering spectroscopy
porous silicon
backscattering
Multilayers
17 Citations (Scopus)

Surface characterization of the oxide layer grown on Ti-Nb-Zr and Ti-Nb-Al alloys

Gutiérrez, A., López, M. F., Jiménez, J. A., Morant, C., Pászti, F. & Climent, A., Aug 2004, In : Surface and Interface Analysis. 36, 8, p. 977-980 4 p.

Research output: Contribution to journalArticle

Oxides
oxides
X ray photoelectron spectroscopy
topography
Rutherford backscattering spectroscopy
2003
16 Citations (Scopus)

Europium-doped sesquioxide thin films grown on sapphire by PLD

Bär, S., Huber, G., Gonzalo, J., Perea, A., Climent, A. & Pászti, F., Dec 15 2003, In : Materials Science and Engineering B. 105, 1-3, p. 30-33 4 p.

Research output: Contribution to journalArticle

Europium
Aluminum Oxide
Pulsed laser deposition
europium
Sapphire
2002
6 Citations (Scopus)

Development of enhanced depth-resolution technique for shallow dopant profiles

Fujita, M., Tajima, J., Nakagawa, T., Abo, S., Kinomura, A., Pászti, F., Takai, M., Schork, R., Frey, L. & Ryssel, H., May 2002, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 190, 1-4, p. 26-33 8 p.

Research output: Contribution to journalArticle

Rutherford backscattering spectroscopy
Ion beams
Doping (additives)
Ions
Depth profiling
9 Citations (Scopus)

Medium energy ion-nanoprobe with TOF-RBS for semiconductor process analysis

Iwasaki, K., Tajima, J., Takayama, H., Pászti, F. & Takai, M., May 2002, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 190, 1-4, p. 296-300 5 p.

Research output: Contribution to journalArticle

Nanoprobes
Rutherford backscattering spectroscopy
Ion beams
Scattering
Ions
20 Citations (Scopus)
Ions
Rutherford backscattering spectroscopy
Power electronics
ions
Irradiation
107 Citations (Scopus)

Tracks induced by swift heavy ions in semiconductors

Szenes, G., Horváth, Z., Pécz, B., Pászti, F. & Tóth, L., Jan 15 2002, In : Physical Review B - Condensed Matter and Materials Physics. 65, 4, p. 452061-452065 5 p., 045206.

Research output: Contribution to journalArticle

Heavy Ions
Heavy ions
heavy ions
Ions
Semiconductor materials
2001

Combined analyses of ion beam synthesized layers in porous silicon

Ramos, A. R., Pászti, F., Horváth, Z., Vázsonyi, E., Conde, O., Da Silva, M. F., Da Silva, M. R. & Soares, J. C., 2001, In : Acta Physica Polonica A. 100, 5, p. 773-780 8 p.

Research output: Contribution to journalArticle

porous silicon
ion beams
impurities
implantation
fluence
3 Citations (Scopus)

Effect of MeV energy He and N pre-implantation on the formation of porous silicon

Manuaba, A., Pászti, F., Ortega, C., Grosman, A., Horváth, Z., Szilágyi, E., Khánh, N. Q. & Vickridge, I., Jun 2001, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 179, 1, p. 63-70 8 p.

Research output: Contribution to journalArticle

Porous silicon
porous silicon
Etching
implantation
etching
3 Citations (Scopus)

Synthesis of cobalt silicide on porous silicon by high dose ion implantation

Ramos, A. R., Pászti, F., Kotai, E., Vázsonyi, E., Conde, O., Da Silva, M. R., Da Silva, M. F. & Soares, J. C., May 2001, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 178, 1-4, p. 283-286 4 p.

Research output: Contribution to journalArticle

Porous silicon
Cobalt
porous silicon
Ion implantation
ion implantation
2000
4 Citations (Scopus)
Backscattering
Pore structure
Spectrometry
backscattering
porosity
4 Citations (Scopus)
Porous silicon
Rutherford backscattering spectroscopy
porous silicon
Porosity
Single crystals
4 Citations (Scopus)

Ion beam characterisation and modification of porous silicon

Pászti, F. & Battistig, G., Nov 2000, In : Physica Status Solidi (A) Applied Research. 182, 1, p. 271-278 8 p.

Research output: Contribution to journalArticle

Porous silicon
porous silicon
Ion implantation
Ion beams
ion implantation
9 Citations (Scopus)

Ion beam synthesis of chromium silicide on porous silicon

Ramos, A. R., Conde, O., Pászti, F., Battistig, G., Vázsonyi, E., Da Silva, M. R., Da Silva, M. F. & Soares, J. C., Mar 2000, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 161, p. 926-930 5 p.

Research output: Contribution to journalArticle

Porous silicon
Chromium
porous silicon
Ion beams
chromium
3 Citations (Scopus)

Pore propagation directions in P+ porous silicon

Vázsonyi, É., Battistig, G., Horváth, Z. E., Fried, M., Kádár, G., Pászti, F., Cantin, J. L., Vanhaeren, D., Stalmans, L. & Poortmans, J., 2000, In : Journal of Porous Materials. 7, 1, p. 57-61 5 p.

Research output: Contribution to journalArticle

Porous silicon
porous silicon
porosity
propagation
wafers
11 Citations (Scopus)
Rutherford backscattering spectroscopy
Spectrometry
backscattering
Multilayers
Magnetron sputtering
33 Citations (Scopus)
Heavy Ions
Power electronics
Heavy ions
low speed
heavy ions
1999
3 Citations (Scopus)

Comparison of FIB-induced physical and chemical etching

Park, Y. K., Pászti, F., Takai, M., Lehrer, C., Frey, L. & Ryssel, H., 1999, Proceedings of the International Conference on Ion Implantation Technology. IEEE, Vol. 2. p. 820-823 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Etching
Sputtering
Atoms
Iodine
Gases
16 Citations (Scopus)
Porous silicon
porous silicon
Ions
Scanning
scanning
19 Citations (Scopus)

Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon

Savaniu, C., Arnautu, A., Cobianu, C., Craciun, G., Flueraru, C., Zaharescu, M., Parlog, C., Pászti, F. & Van Den Berg, A., Jul 30 1999, In : Thin Solid Films. 349, 1, p. 29-35 7 p.

Research output: Contribution to journalArticle

Tin dioxide
Antimony
Porous silicon
Platinum
antimony
1998
5 Citations (Scopus)
grazing
Surface topography
Backscattering
Detectors
Scanning
3 Citations (Scopus)

Effect of surface topography on scanning RBS microbeam measurements

Simon, A., Pászti, F., Uzonyi, I., Manuaba, A. & Kiss, A., Jul 1 1998, In : Vacuum. 50, 3-4, p. 503-506 4 p.

Research output: Contribution to journalArticle

microbeams
Rutherford backscattering spectroscopy
Surface topography
Spectrometry
backscattering
5 Citations (Scopus)

Grazing irradiation of porous silicon by 500 keV He ions

Manuaba, A., Pászti, F., Battistig, G., Ortega, C. & Grosman, A., Jul 1 1998, In : Vacuum. 50, 3-4, p. 349-351 3 p.

Research output: Contribution to journalArticle

Porous silicon
grazing
porous silicon
Porosity
Irradiation
18 Citations (Scopus)
Backscattering
Spectrometry
backscattering
spectroscopy
porosity
9 Citations (Scopus)
microbeams
Rutherford backscattering spectroscopy
Surface topography
backscattering
topography
18 Citations (Scopus)

Pore structure investigations in porous silicon by ion beam analytical methods

Pászti, F. & Szilágyi, E., Jul 1 1998, In : Vacuum. 50, 3-4, p. 451-462 12 p.

Research output: Contribution to journalArticle

Porous silicon
Pore structure
porous silicon
Ion beams
ion beams
12 Citations (Scopus)
Ion beams
Hydrogen
hydrogen atoms
energy distribution
Ions
1997
1 Citation (Scopus)

Charge carrier lifetime modification in silicon by high energy H+, He+ ion implantation

Khánh, N. Q., Tüttó, P., Jároli, E. N., Buiu, O., Bíró, L., Pászti, F., Mohácsy, T., Kovacsics, C., Manuaba, A. & Gyulai, J., 1997, In : Materials Science Forum. 248-249, p. 101-106 6 p.

Research output: Contribution to journalArticle

Carrier lifetime
Silicon
carrier lifetime
Charge carriers
Ion implantation
2 Citations (Scopus)

Detectors for microbeam applications at medium ion energy

Pászti, F., Park, Y. K. & Takai, M., Jul 1997, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 130, 1-4, p. 247-252 6 p.

Research output: Contribution to journalArticle

microbeams
Ions
Detectors
Angular distribution
detectors
11 Citations (Scopus)

Investigation of the morphology of porous silicon by rutherford backscattering spectrometry

Szilágyi, E., Hajnal, Z., Pászti, F., Buiu, O., Craciun, G., Cobianu, C., Savaniu, C. & Vázsonyi, E., 1997, In : Materials Science Forum. 248-249, p. 373-376 4 p.

Research output: Contribution to journalArticle

Porous silicon
Rutherford backscattering spectroscopy
porous silicon
Spectrometry
backscattering