• 604 Citations
  • 15 h-Index
20002016
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Research Output 2000 2016

  • 604 Citations
  • 15 h-Index
  • 36 Article
  • 7 Conference contribution
2016
5 Citations (Scopus)

Influence of the confinement on laser-induced dry etching at the rear side of fused silica

Pan, Y., Ehrhardt, M., Lorenz, P., Han, B., Hopp, B., Vass, C., Ni, X. & Zimmer, K., Apr 1 2016, In : Applied Physics A: Materials Science and Processing. 122, 4, 365.

Research output: Contribution to journalArticle

Dry etching
Fused silica
Etching
Photoresists
etching
2015

Comparative study on grating fabrication in transparent materials by TWIN-LIBWE and ultrashort pulsed ablation techniques

Vass, C., Kiss, B., Flender, R., Felházi, Z., Lorenz, P., Ehrhardt, M. & Zimmer, K., 2015, In : Journal of Laser Micro Nanoengineering. 10, 1, p. 38-42 5 p.

Research output: Contribution to journalArticle

transparence
Wet etching
Fused silica
Ablation
Full width at half maximum
2 Citations (Scopus)

Comparison of simultaneous on-line optical and acoustic laser damage detection methods in the nanosecond pulse duration domain

Somoskoi, T., Vass, C., Mero, M., Mingesz, R., Bozóki, Z. & Osvay, K., May 1 2015, In : Laser Physics. 25, 5, 056002.

Research output: Contribution to journalArticle

Laser damage
laser damage
Damage detection
yield point
pulse duration

Fabrication of polarizer by metal evaporation of fused silica surface relief gratings

Kiss, B., Flender, R., Kopniczky, J., Ujhelyi, F. & Vass, C., 2015, In : Journal of Laser Micro Nanoengineering. 10, 1, p. 53-58 6 p.

Research output: Contribution to journalArticle

Fused silica
polarizers
Evaporation
evaporation
gratings
4 Citations (Scopus)

Multi-pulse LIBDE of fused silica at different thicknesses of the organic absorber layer

Pan, Y., Ehrhardt, M., Lorenz, P., Han, B., Hopp, B., Vass, C., Ni, X. & Zimmer, K., Dec 30 2015, In : Applied Surface Science. 359, p. 449-454 6 p.

Research output: Contribution to journalArticle

Dry etching
Fused silica
Etching
Laser pulses
Lasers
2014
12 Citations (Scopus)

Reducing the incubation effects for rear side laser etching of fused silica

Zimmer, K., Ehrhardt, M., Lorenz, P., Wang, X., Vass, C., Csizmadia, T. & Hopp, B., May 30 2014, In : Applied Surface Science. 302, p. 42-45 4 p.

Research output: Contribution to journalArticle

Fused silica
Etching
Lasers
Laser pulses
Dry etching
2013
1 Citation (Scopus)

A unified optical damage criterion based on the probability density distribution of detector signals

Somoskoi, T., Vass, C., Mero, M., Mingesz, R., Bozóki, Z. & Osvay, K., 2013, Proceedings of SPIE - The International Society for Optical Engineering. SPIE, Vol. 8885. 88850N

Research output: Chapter in Book/Report/Conference proceedingConference contribution

signal detectors
Photoacoustic effect
Probability Density
Light scattering
Optical microscopy

Comparing the sensitivity of four laser induced damage tests at 266 nm and 532 nm

Somoskoi, T., Vass, C., Mero, M., Mingesz, R., Bozóki, Z. & Osvay, K., 2013, CLEO: Science and Innovations, CLEO_SI 2013.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Light measurement
Laser damage
Shock waves
reflectors
shock waves

Comparing the sensitivity of four laser induced damage tests at 266 nm and 532 nm

Somoskoi, T., Vass, C., Mero, M., Mingesz, R., Bozóki, Z. & Osvay, K., 2013, CLEO: QELS_Fundamental Science, CLEO:QELS FS 2013.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Light measurement
Laser damage
Shock waves
reflectors
shock waves

Comparing the sensitivity of four laser induced damage tests at 266 nm and 532 nm

Somoskoi, T., Vass, C., Mero, M., Mingesz, R., Bozóki, Z. & Osvay, K., 2013, 2013 Conference on Lasers and Electro-Optics, CLEO 2013. IEEE Computer Society, 6833862

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Light measurement
Laser damage
Shock waves
Laser pulses
Inspection
3 Citations (Scopus)

Etching of fused silica fiber by metallic laser-induced backside wet etching technique

Vass, C., Kiss, B., Kopniczky, J. & Hopp, B., Aug 1 2013, In : Applied Surface Science. 278, p. 241-244 4 p.

Research output: Contribution to journalArticle

Wet etching
Fused silica
Etching
Fibers
Lasers
1 Citation (Scopus)

Fabrication of micro- and submicrometer period metal reflection gratings by melt-imprint technique

Kiss, B., Flender, R. & Vass, C., Dec 2013, In : Journal of Laser Micro Nanoengineering. 8, 3, p. 287-291 5 p.

Research output: Contribution to journalArticle

Tin
micrometers
tin
gratings
Fabrication
2 Citations (Scopus)

Microstructuring of transparent dielectric films by TWIN-LIBWE method for OWLS applications

Kiss, B., Ujhelyi, F., Sipos, Á., Farkas, B., Dombi, P., Osvay, K. & Vass, C., Dec 2013, In : Journal of Laser Micro Nanoengineering. 8, 3, p. 271-275 5 p.

Research output: Contribution to journalArticle

Dielectric films
Wet etching
Laser beams
etching
laser beams
10 Citations (Scopus)

Production of nanostructures on bulk metal samples by laser ablation for fabrication of low-reflective surfaces

Hopp, B., Smausz, T., Csizmadia, T., Vass, C., Tápai, C., Kiss, B., Ehrhardt, M., Lorenz, P. & Zimmer, K., Nov 2013, In : Applied Physics A: Materials Science and Processing. 113, 2, p. 291-296 6 p.

Research output: Contribution to journalArticle

Laser ablation
laser ablation
Nanostructures
Silver
Metals
2011
3 Citations (Scopus)
Diffraction efficiency
Etching
Diffraction gratings
etching
gratings
1 Citation (Scopus)

Grating fabrication in dielectric coatings by TWIN-LIBWE

Vass, C., Kiss, B., Sipos, Á., Újhelyi, F., Dombi, P. & Osvay, K., 2011, 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011. 5943349

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wet etching
Fabrication
Coatings
Lasers
Etching
2010
16 Citations (Scopus)

Comparative study of different indirect laser-based methods developed for microprocessing of transparent materials

Hopp, B., Smausz, T., Csizmadia, T., Vass, C., Csákó, T. & Szabó, G., Feb 2010, In : Journal of Laser Micro Nanoengineering. 5, 1, p. 80-85 6 p.

Research output: Contribution to journalArticle

transparence
Etching
etching
Plasmas
Lasers
10 Citations (Scopus)

Interpretation and modeling of laser-induced backside wet etching procedure

Vass, C., Budai, J., Schay, Z. & Hopp, B., Feb 2010, In : Journal of Laser Micro Nanoengineering. 5, 1, p. 43-47 5 p.

Research output: Contribution to journalArticle

Wet etching
Etching
etching
Fused silica
Lasers
2009
26 Citations (Scopus)

Comparative study on Pulsed Laser Deposition and Matrix Assisted Pulsed Laser Evaporation of urease thin films

Smausz, T., Megyeri, G., Kékesi, R., Vass, C., György, E., Sima, F., Mihailescu, I. N. & Hopp, B., Jun 1 2009, In : Thin Solid Films. 517, 15, p. 4299-4302 4 p.

Research output: Contribution to journalArticle

Urease
Pulsed laser deposition
Pulsed lasers
pulsed laser deposition
pulsed lasers
27 Citations (Scopus)

Laser-induced backside dry and wet etching of transparent materials using solid and molten tin as absorbers

Hopp, B., Smausz, T., Vass, C., Szabó, G., Böhme, R., Hirsch, D. & Zimmer, K., 2009, In : Applied Physics A: Materials Science and Processing. 94, 4, p. 899-904 6 p.

Research output: Contribution to journalArticle

transparence
Dry etching
Tin
Wet etching
Molten materials
6 Citations (Scopus)

Surface plasmon scattering on polymer-bimetal layer covered fused silica gratings generated by laser induced backside wet etching

Tóháti, H., Sipos, Á., Szekeres, G., Mathesz, A., Szalai, A., Jójárt, P., Budai, J., Vass, C., Koházi-Kis, A., Csete, M. & Bor, Z., Mar 1 2009, In : Applied Surface Science. 255, 10, p. 5130-5137 8 p.

Research output: Contribution to journalArticle

Bimetals
Wet etching
Fused silica
Polymers
Scattering
22 Citations (Scopus)

Time-resolved measurements during backside dry etching of fused silica

Zimmer, K., Böhme, R., Vass, C. & Hopp, B., Sep 30 2009, In : Applied Surface Science. 255, 24, p. 9617-9621 5 p.

Research output: Contribution to journalArticle

Dry etching
Fused silica
Time measurement
Etching
Lasers
2008
23 Citations (Scopus)
Wet etching
Fused silica
etching
gratings
silicon dioxide
9 Citations (Scopus)

Sub-wavelength ripples in fused silica after irradiation of the solid/liquid interface with ultrashort laser pulses

Böhme, R., Vass, C., Hopp, B. & Zimmer, K., Dec 10 2008, In : Nanotechnology. 19, 49, 495301.

Research output: Contribution to journalArticle

Fused silica
Ultrashort pulses
Irradiation
Wavelength
Surface structure
2007
34 Citations (Scopus)
Wet etching
Fused silica
submerging
Laser beams
etching
9 Citations (Scopus)
Surface plasmon resonance
ultraviolet lasers
surface plasmon resonance
micrometers
Metals
21 Citations (Scopus)

Fabrication of 550 nm gratings in fused silica by laser induced backside wet etching technique

Vass, C., Osvay, K., Csete, M. & Hopp, B., Jul 31 2007, In : Applied Surface Science. 253, 19, p. 8059-8063 5 p.

Research output: Contribution to journalArticle

Wet etching
Fused silica
etching
gratings
silicon dioxide
21 Citations (Scopus)

Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation

Smausz, T., Csizmadia, T., Kresz, N., Vass, C., Márton, Z. & Hopp, B., Dec 15 2007, In : Applied Surface Science. 254, 4, p. 1091-1095 5 p.

Research output: Contribution to journalArticle

Dry etching
absorbers
Metals
etching
Irradiation
45 Citations (Scopus)

Laser induced backside dry etching of transparent materials

Hopp, B., Vass, C. & Smausz, T., Jul 31 2007, In : Applied Surface Science. 253, 19, p. 7922-7925 4 p.

Research output: Contribution to journalArticle

transparence
Dry etching
etching
Wet etching
Etching
2006
30 Citations (Scopus)

Comparing study of subpicosecond and nanosecond wet etching of fused silica

Vass, C., Sebok, D. & Hopp, B., Apr 30 2006, In : Applied Surface Science. 252, 13 SPEC. ISS., p. 4768-4772 5 p.

Research output: Contribution to journalArticle

Wet etching
Fused silica
Quartz
etching
silicon dioxide
38 Citations (Scopus)
etching
gratings
laser beams
silicon dioxide
fabrication
34 Citations (Scopus)
Dry etching
Fused silica
transparence
etching
gratings
6 Citations (Scopus)

Surface plasmon resonance spectroscopy on rotated sub-micrometer polymer gratings generated by UV-laser based two-beam interference

Csete, M., Szekeres, G., Vass, C., Maghelli, N., Osvay, K., Bor, Z., Pietralla, M. & Marti, O., Apr 30 2006, In : Applied Surface Science. 252, 13 SPEC. ISS., p. 4773-4780 8 p.

Research output: Contribution to journalArticle

Surface plasmon resonance
ultraviolet lasers
surface plasmon resonance
micrometers
Polymers
2005
3 Citations (Scopus)

Effect of sub-micrometer polymer gratings generated by two-beam interference on surface plasmon resonance

Csete, M., Vass, C., Kokavecz, J., Goncalves, M., Megyesi, V., Bor, Z., Pietralla, M. & Marti, O., Jul 15 2005, In : Applied Surface Science. 247, 1-4, p. 477-485 9 p.

Research output: Contribution to journalArticle

Surface plasmon resonance
surface plasmon resonance
micrometers
Polymers
Modulation
6 Citations (Scopus)

Sub-micrometer adhesion modulation on polymer surfaces containing gratings produced by two-beam interference

Csete, M., Kresz, N., Vass, C., Kurdi, G., Heiner, Z., Deli, M., Bor, Z. & Marti, O., Dec 2005, In : Materials Science and Engineering C. 25, 5-8, p. 813-819 7 p.

Research output: Contribution to journalArticle

micrometers
Polymers
adhesion
Adhesion
Modulation
36 Citations (Scopus)

Time-resolved study of absorbing film assisted laser induced forward transfer of Trichoderma longibrachiatum conidia

Hopp, B., Smausz, T., Barna, N., Vass, C., Antal, Z., Kredics, L. & Chrisey, D., Mar 21 2005, In : Journal of Physics D: Applied Physics. 38, 6, p. 833-837 5 p.

Research output: Contribution to journalArticle

Time and motion study
Lasers
Full width at half maximum
lasers
plumes
2004
54 Citations (Scopus)
Wet etching
Fused silica
etching
silicon dioxide
Lasers
1 Citation (Scopus)
photography
Photography
Excimer lasers
debris
ejection
69 Citations (Scopus)

Wet etching of fused silica: A multiplex study

Vass, C., Smausz, T. & Hopp, B., Sep 7 2004, In : Journal of Physics D: Applied Physics. 37, 17, p. 2449-2454 6 p.

Research output: Contribution to journalArticle

Wet etching
Fused silica
etching
silicon dioxide
Lasers
2002
2 Citations (Scopus)

Laser induced backside wet etching of fused silica: Absorption coefficient dependence

Vass, C., Hopp, B. & Smausz, T., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Carabelas, A., Baldacchini, G., Lazzaro, P. & Zevgolis, D. (eds.). Vol. 5131. p. 200-204 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wet etching
Fused silica
absorptivity
etching
Naphthalene
10 Citations (Scopus)

Spatial separation of fast and slow components of pulsed laser plumes

Hopp, B., Kresz, N., Vass, C., Tóth, Z., Smausz, T. & Ignácz, F., Jan 28 2002, In : Applied Surface Science. 186, 1-4, p. 298-302 5 p.

Research output: Contribution to journalArticle

Pulsed lasers
plumes
pulsed lasers
particulates
Pulsed laser deposition

The influence of particulate size on the formation of polytetrafluoroethylene thin films during pulsed laser deposition

Smausz, T., Hopp, B., Kresz, N. & Vass, C., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Carabelas, A., Baldacchini, G., Lazzaro, P. & Zevgolis, D. (eds.). Vol. 5131. p. 274-278 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

polytetrafluoroethylene
Pulsed laser deposition
Polytetrafluoroethylenes
particulates
pulsed laser deposition
2000
2 Citations (Scopus)

Experimental study on droplet generation during excimer laser ablation of polyethylene glycol 1000

Smausz, T., Hopp, B., Vass, C. & Tóth, Z., Dec 15 2000, In : Applied Surface Science. 168, 1-4, p. 146-149 4 p.

Research output: Contribution to journalArticle

Excimer lasers
Laser ablation
excimer lasers
Polyethylene glycols
laser ablation